THREE DIMENSIONAL PROFILE INSPECTING APPARATUS

• US 20100128285A1
• Filed: 05/10/2009
• Published: 05/27/2010
• Est. Priority Date: 11/21/2008
• Status: Active Grant

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Kuo, Shih Hsuan, Chen, Jin Liang, WANG, Wei Cheng
• Granted Patent: US 7,986,402 B2
• Time in Patent Office: Days
• US Class Current: 356/609
• CPC Class Codes: G01B 11/245 using a plurality of fixed, simultaneously operating transducers G01B11/2408 - G01B11/2425, G01B11/255 take precedence
• CPC Class Codes: G01B 11/272 using photoelectric detection means

Abstract

A three-dimensional profile inspecting apparatus includes at least two optical inspecting apparatuses and a tilt angle adjusting mechanism. The tilt angle adjusting mechanism is equipped with the at least two optical inspecting apparatuses so as to adjust the tilt angles of the at least two optical inspecting apparatuses. When the tilt angles of the optical inspecting apparatuses are changed, the focuses of the optical inspecting apparatuses remain at a single position and a subject to be inspected is within the fields of view of the optical inspecting apparatuses. The three-dimensional profile of the subject can be obtained by building the images collected by the two optical inspecting apparatuses.

Claims

1. A three-dimensional profile inspecting apparatus, comprising:

at least two optical inspecting apparatuses; and

a tilt angle adjustment means equipped with the at least two optical inspecting apparatuses and configured to adjust tilt angles of the at least two optical inspecting apparatuses,

wherein said at least two optical inspecting apparatuses maintain focus on a single position and a subject to be inspected is within the fields of view of the at least two optical inspecting apparatuses when the at least two optical inspecting apparatus change tilt angles.

2. The three-dimensional profile inspecting apparatus of claim 1, wherein the tilt angle adjustment mechanism is a circular rail.

3. The three-dimensional profile inspecting apparatus of claim 2, wherein said at least two optical inspecting apparatuses are equipped with pivotal rollers, and wherein said at least two optical inspecting apparatuses move along the circular rail via the pivotal rollers to adjust tilt angles thereof.

4. The three-dimensional profile inspecting apparatus of claim 2, wherein the circular rail is formed integrally.

5. The three-dimensional profile inspecting apparatus of claim 1, wherein the tilt angle adjustment means is a connection-rod mechanism, an X-Y planar moving stage, or a rotation stage.

6. The three-dimensional profile inspecting apparatus of claim 1, further comprising:

a direction angle adjustment means to adjust a direction angle of the subject.

7. The three-dimensional profile inspecting apparatus of claim 6, wherein said direction angle adjustment means comprises a moving stage and a rotation stage.

8. The three-dimensional profile inspecting apparatus of claim 1, wherein each of the at least two optical inspecting apparatuses is associated with a motor, a lead screw and a connecting bar so as to move the at least two optical inspecting apparatuses.

9. The three-dimensional profile inspecting apparatus of claim 1, wherein each optical inspecting apparatus comprises an optical microscope, non-optical microscope or an interferometer.

10. The three-dimensional profile inspecting apparatus of claim 1, wherein the optical inspecting apparatuses maintain focusing on a single focus plane.