Mirror device
First Claim
Patent Images
1. A mirror device comprising:
- an electrode disposed on a substrate;
a protective film formed on the electrode;
a mirror disposed above the electrode;
an electrically conductive hinge disposed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof; and
the hinge has a lower resistance than the protective film.
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Abstract
A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof.
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Citations
16 Claims
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1. A mirror device comprising:
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an electrode disposed on a substrate; a protective film formed on the electrode; a mirror disposed above the electrode; an electrically conductive hinge disposed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof; and
the hinge has a lower resistance than the protective film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 9, 10, 11, 12, 13, 15, 16)
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8. A mirror device, comprising:
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an electrode disposed on a substrate; a mirror disposed above the electrode; a hinge connected to the mirror through a mirror connection part between the mirror and hinge, wherein the mirror connection part has a resistance approximately the same as that of the hinge.
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14. A MEMS device, comprising:
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a fixed electrode covered with a protective film disposed on a substrate; a movable electrode disposed above the fixed electrode; and a hinge composed of a semiconductor material and joined to the movable electrode and the fixed electrode, wherein the hinge has a resistance is higher than the movable electrode and the fixed electrode.
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Specification