METHOD AND SYSTEM FOR MEASURING PHYSICAL PARAMETERS WITH A PIEZOELECTRIC BIMORPH CANTILEVER IN A GASEOUS OR LIQUID ENVIRONMENT
First Claim
1. A method for measuring at least two physical parameters in an environment comprising at least one of a gas and a liquid, the method comprising:
- providing a piezoelectric bimorph cantilever comprising at least a first layer, a piezoelectric layer, and two electrodes;
placing the piezoelectric bimorph cantilever in the environment;
vibrating the piezoelectric bimorph cantilever;
determining the resonant frequency of at least two resonance modes of the piezoelectric bimorph cantilever; and
determining at least two physical parameters of the environment based on the at least two resonance modes.
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Accused Products
Abstract
A piezoelectric bimorph cantilever is used for determining physical parameters in a gaseous or liquid environment. The sensor works as a driven and damped oscillator. Contrary to common cantilever sensor systems, the piezoelectric film of the bimorph cantilever acts as both a sensor and an actuator. Using at least two resonance mode of the bimorph cantilever, at least two physical parameters can be measured simultaneously in a gas or a liquid. An optimized piezoelectric cantilever and a method to produce the cantilever are also described.
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Citations
23 Claims
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1. A method for measuring at least two physical parameters in an environment comprising at least one of a gas and a liquid, the method comprising:
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providing a piezoelectric bimorph cantilever comprising at least a first layer, a piezoelectric layer, and two electrodes; placing the piezoelectric bimorph cantilever in the environment; vibrating the piezoelectric bimorph cantilever; determining the resonant frequency of at least two resonance modes of the piezoelectric bimorph cantilever; and determining at least two physical parameters of the environment based on the at least two resonance modes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A sensor for measuring at least two physical parameters in an environment comprising at least one of a gas and a liquid, comprising:
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a piezoelectric bimorph cantilever comprising at least a first layer, a piezoelectric layer, and two electrodes; a support on which the piezoelectric bimorph cantilever is mounted; optionally protective housing comprising the piezoelectric bimorph cantilever; electrical connections to the electrodes of the piezoelectric bimorph cantilever; means for vibrating the piezoelectric bimorph cantilever with the electrodes; means for measuring an output signal of the electrodes; means for determining the resonant frequency of at least two resonance modes based on the output signal of the electrodes; and means for determining at least two physical parameters of the environment based on the resonance frequencies. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification