METHOD AND APPARATUS FOR LINEAR PAD CONDITIONING
First Claim
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1. An apparatus for conditioning a polishing pad, comprising:
- a base coupled to a platform;
a first arm member having a first end coupled to the base and an opposing second end;
a second arm member having a first end pivotably coupled to a second end of the first arm member; and
a conditioning disk coupled to a second end of the second arm member opposite the first end of the first arm member.
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Abstract
A method and apparatus for conditioning a polishing pad is described. The apparatus includes a base coupled to a platform, a first arm member having a first end coupled to the base, and a second arm member having a first end pivotably coupled to a second end of the first arm member and a conditioning disk coupled to a second end opposite the first end. The method includes rotating a polishing pad, urging a rotating conditioning disk against a polishing surface of the polishing pad, and moving the conditioning disk in a linear direction relative to the rotating polishing pad to perform a conditioning process.
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Citations
26 Claims
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1. An apparatus for conditioning a polishing pad, comprising:
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a base coupled to a platform; a first arm member having a first end coupled to the base and an opposing second end; a second arm member having a first end pivotably coupled to a second end of the first arm member; and a conditioning disk coupled to a second end of the second arm member opposite the first end of the first arm member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of conditioning a polishing pad, comprising:
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rotating a polishing pad; urging a rotating conditioning disk against a polishing surface of the polishing pad; and moving the conditioning disk in a linear direction relative to the rotating polishing pad to perform a conditioning process. - View Dependent Claims (14, 15, 16, 17)
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18. An apparatus for conditioning a polishing pad, comprising:
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a base coupled to a platform; a first arm member coupled to the base; a second arm member coupled to the first arm member; a conditioning disk coupled to the second arm member opposite the base; and a joint member coupled between the first arm member and the second arm member, the joint member adapted to provide rotation of the first arm member relative to the second arm member. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26)
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Specification