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X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING

  • US 20100132460A1
  • Filed: 11/18/2009
  • Published: 06/03/2010
  • Est. Priority Date: 11/18/2005
  • Status: Active Grant
First Claim
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1-16. -16. (canceled)

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