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HIGH-SENSITIVITY Z-AXIS VIBRATION SENSOR AND METHOD OF FABRICATING THE SAME

  • US 20100132467A1
  • Filed: 07/24/2009
  • Published: 06/03/2010
  • Est. Priority Date: 12/03/2008
  • Status: Active Grant
First Claim
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1. A high-sensitivity MEMS-type z-axis vibration sensor, which senses z-axis vibration by differentially shifting an electric capacitance between an upper electrode and a lower electrode formed above and below a center ground electrode from positive to negative or vice versa according to a change of center mass of the center ground electrode due to vibration,wherein a part of the lower electrode is additionally connected to the center mass of the center ground electrode to increase the size of the center mass of the center ground electrode.

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