BROAD-RANGE MAGNETIC SENSOR AND MANUFACTURING PROCESS THEREOF
First Claim
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1. A magnetic sensor, comprising a fluxgate sensor and a Hall sensor integrated in a same integrated device.
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Abstract
A magnetic sensor is formed by a fluxgate sensor and by at least one Hall sensor integrated in a same integrated device, wherein the magnetic core of the fluxgate sensor is formed by a magnetic region that operates also as a concentrator for the Hall sensor. The magnetic region is manufactured in a post-machining stage on the metallization layers wherein the energizing coil and sensing coil of the fluxgate sensor are formed; the energizing and sensing coils are formed on a semiconductor substrate housing the conductive regions of the Hall sensor.
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11 Claims
- 1. A magnetic sensor, comprising a fluxgate sensor and a Hall sensor integrated in a same integrated device.
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6. A process for manufacturing a magnetic sensor, comprising the step of:
forming a fluxgate sensor and a Hall sensor in a same integrated device. - View Dependent Claims (7, 8)
Specification