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GAS DISTRIBUTION BLOCKER APPARATUS

  • US 20100136216A1
  • Filed: 11/30/2009
  • Published: 06/03/2010
  • Est. Priority Date: 12/01/2008
  • Status: Active Grant
First Claim
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1. A processing apparatus, comprising:

  • a backing plate having an aperture in fluid communication with a gas source;

    a showerhead coupled to the backing plate and having a plurality of orifices disposed from an upstream side to a downstream side thereof; and

    a blocker member disposed between the backing plate and the showerhead such that a first plenum is formed between the backing plate and the blocker plate and a second plenum is formed between the blocker plate and the showerhead, wherein the volume of the first plenum is adjustable with respect to the volume of the second plenum.

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