METHOD FOR FABRICATION OF LOW-POLARIZATION IMPLANTABLE STIMULATION ELECTRODE
First Claim
1. A method for fabricating an implantable electrode, comprising:
- roughening a surface of the electrode;
cleaning the roughened electrode surface; and
depositing a valve metal oxide coating over the roughened electrode surface.
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Abstract
A method for fabricating an implantable medical electrode includes roughening the electrode substrate, applying an adhesion layer, and depositing a valve metal oxide coating over the adhesion layer under conditions optimized to minimize electrode impedance and post-pulse polarization. The electrode substrate may be a variety of electrode metals or alloys including titanium, platinum, platinum-iridium, or niobium. The adhesion layer may be formed of titanium or zirconium. The valve metal oxide coating is a ruthenium oxide coating sputtered onto the adhesion layer under controlled target power, sputtering pressure, and sputter gas ratio setting optimized to minimize electrode impedance and post-pulse polarization.
71 Citations
26 Claims
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1. A method for fabricating an implantable electrode, comprising:
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roughening a surface of the electrode; cleaning the roughened electrode surface; and depositing a valve metal oxide coating over the roughened electrode surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 21)
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15-20. -20. (canceled)
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22. A method for fabricating an implantable medical electrode, the method comprising:
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mechanically roughening a surface of the substrate; and applying a coating of a valve metal oxide over the roughened surface using sputtering in a sputtering atmosphere comprising oxygen and argon. - View Dependent Claims (23, 24, 25, 26)
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Specification