ROTATION RATE SENSOR
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Abstract
A rotation rate sensor comprises a substrate and two structures which move relative to the substrate on a design plane (x-y), with the two moving structures being coupled to form a coupled structure such that the coupled structure has a first oscillation mode with antiphase deflections of the moving structures in a first direction (x) on the design plane (x-y) as excitation mode. The coupled structure has a second oscillation mode as a detection mode which is excited by Coriolis accelerations when the first oscillation mode is excited and on rotation about a sensitive axis (z) of the rotation rate sensor. The sensitive axis is at right angles to the design plane (x-y), and the coupled structure is designed such that, subject to optimal preconditions, it does not have any oscillation mode which can be excited by linear accelerations of the rotation rate sensor in a direction parallel to the second axis.
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21. A rotation rate sensor having
a substrate and two multipart individual structures which can move relative to the substrate on a design plane wherein the two individual structures are coupled to form a coupled structure such that the coupled structure has a first oscillation mode with antiphase deflections of the moving structures in a first direction on the design plane as an excitation mode, the coupled structure has a second oscillation mode as a detection mode, which is excited by Coriolis accelerations when the first oscillation mode is excited and during rotation about a sensitive axis, which is at right angles to the design plane. of the rotation rate sensor, characterized in that a rotating spring element is provided which is soft for torsion about an axis of symmetry which is parallel to the sensitive axis, is stiff for all other loads and couples the two individual structures to one another, such that parts of the individual structures carry out a common rotary oscillation about the axis of symmetry, wherein the detection mode comprises antiphase linear oscillation, transferred from the rotary oscillation, of parts of the two individual structures along a second direction, which is at right angles to the first direction.
Specification