Electronic Device and Method for Manufacturing Thereof
First Claim
1. An electronic device comprising:
- a substrate;
a functional element formed above the substrate;
a guard ring surrounding the functional element, the guard ring being away from the functional element;
an interlayer insulating film surrounding the guard ring;
a first cover layer formed above the guard ring and the functional element, the first cover layer being away from the functional element, the first cover layer including a plurality of holes; and
a second cover layer formed above the first cover layer.
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Abstract
An electronic device, including a substrate, a functional structure constituting a functional element formed on the substrate, and a cover structure forming a cavity portion in which the functional structure is disposed, is disclosed. In the electronic device, the cover structure includes a laminated structure of an interlayer insulating film and a wiring layer, the laminated structure being formed on the substrate in such a way that it surrounds the cavity portion, and the cover structure has an upside cover portion covering the cavity portion from above, the upside cover portion being formed with part of the wiring layer that is disposed above the functional structure.
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Citations
14 Claims
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1. An electronic device comprising:
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a substrate; a functional element formed above the substrate; a guard ring surrounding the functional element, the guard ring being away from the functional element; an interlayer insulating film surrounding the guard ring; a first cover layer formed above the guard ring and the functional element, the first cover layer being away from the functional element, the first cover layer including a plurality of holes; and a second cover layer formed above the first cover layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An electronic device comprising:
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a substrate; a functional element formed above the substrate; a guard ring surrounding the functional element, the guard ring being away from the functional element; an interlayer insulating film surrounding the guard ring; a first cover layer formed above the guard ring and the functional element, the first cover layer being away from the functional element, the first cover layer including a first plurality of holes; a second cover layer formed above the first cover layer, the second cover layer including a second plurality of holes; and a third cover layer formed above the second cover layer. - View Dependent Claims (11, 12, 13, 14)
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Specification