Substrate holder, stage apparatus, and exposure apparatus with first support part provided in a suction space and second support part
First Claim
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1. A substrate holder comprising:
- a circumferential edge part that surrounds a suction space;
a first support part that is provided in the suction space and that supports a substrate;
second support parts that support the substrate, whereineach of the second support parts has a first end that is positioned at the circumferential edge part and a second end that is positioned adjacent to the first support part, andthe second ends of the second support parts do not substantially line up linearly or accurately.
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Abstract
An object of the invention is to hold a substrate with satisfactory flatness, even at a circumferential edge part that surrounds a suction space. The invention is equipped with a circumferential edge part that surrounds a suction space, and a first support part that is provided in the suction space and that supports a substrate. Furthermore, the invention is equipped with a second support part that extends from the circumferential edge part to the first support part and that supports the substrate.
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Citations
17 Claims
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1. A substrate holder comprising:
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a circumferential edge part that surrounds a suction space; a first support part that is provided in the suction space and that supports a substrate; second support parts that support the substrate, wherein each of the second support parts has a first end that is positioned at the circumferential edge part and a second end that is positioned adjacent to the first support part, and the second ends of the second support parts do not substantially line up linearly or accurately. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for holding a substrate comprising:
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surrounding a suction space with a circumferential edge part; supporting a substrate with a first support part that is provided in the suction space; and supporting the substrate with second support parts, wherein each of the second support parts has a first end that is positioned at the circumferential edge part and a second end that is positioned adjacent to the first support part, and the second ends of the second support parts do not substantially line up linearly or accurately. - View Dependent Claims (17)
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Specification