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Optical system, exposure system, and exposure method

  • US 20100142051A1
  • Filed: 02/05/2010
  • Published: 06/10/2010
  • Est. Priority Date: 01/27/2004
  • Status: Active Grant
First Claim
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1. An optical system comprising:

  • a birefringent optical rotator which is made of an optical material with linear birefringence and optical rotatory power and an optic axis of which is arranged substantially in parallel with an optical axis of the optical system,wherein a beam bundle in a substantially circular polarization state is incident to the birefringent optical rotator.

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