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METHODS FOR DEPOSITING TUNGSTEN FILMS HAVING LOW RESISTIVITY FOR GAPFILL APPLICATIONS

  • US 20100144140A1
  • Filed: 08/04/2009
  • Published: 06/10/2010
  • Est. Priority Date: 12/10/2008
  • Status: Abandoned Application
First Claim
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1. A method of depositing tungsten on substrate in a deposition chamber, the method comprising:

  • introducing a tungsten-containing precursor and a reducing agent to the deposition chamber;

    depositing a first layer of tungsten on the substrate via a first chemical vapor deposition reaction between the tungsten-containing precursor and the reducing agent;

    removing a top portion of the deposited tungsten layer to form an etched tungsten layer; and

    after forming the etched tungsten layer, depositing a second layer of tungsten on the substrate via a second chemical vapor deposition reaction.

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