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METHOD TO INTEGRATE MICRO ELECTRO MECHANICAL SYSTEM AND CMOS IMAGE SENSOR

  • US 20100144156A1
  • Filed: 12/09/2008
  • Published: 06/10/2010
  • Est. Priority Date: 12/09/2008
  • Status: Abandoned Application
First Claim
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1. A method to integrate a micro electro mechanical system and an image sensor, comprising:

  • providing a substrate comprising a micro electro mechanical system (MEMS) region and an image sensor region, said micro electro mechanical system region comprising a micro electro mechanical system component and said image sensor region comprising an image sensor element; and

    performing an etching procedure on said substrate to form a micro electro mechanical system trench in said micro electro mechanical system region and an image sensor trench in said image sensor region, said etching procedure comprising carrying out at least a dry etching and at least a wet etching.

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