RETAINING RING AND ARTICLES FOR CARRIER HEAD
First Claim
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1. A retaining ring for a chemical mechanical polishing head, comprising:
- an upper portion configured to be secured to a base; and
a lower portion having a bottom surface to contact a polishing pad during polishing, wherein the lower portion includes a semi-crystalline thermoplastic polyester.
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Abstract
A carrier head for chemical mechanical polishing that has a base, a mounting assembly connected to the base having a surface for contacting a substrate, and a retaining ring secured to the base. The retaining ring can include perfluoroalkoxy, polyetherketoneketone, polybenzimidazole, a semi-crystalline thermoplastic polyester, or a long molecular chain molecule produced from poly-paraphenylene terephthalamide.
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Citations
16 Claims
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1. A retaining ring for a chemical mechanical polishing head, comprising:
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an upper portion configured to be secured to a base; and a lower portion having a bottom surface to contact a polishing pad during polishing, wherein the lower portion includes a semi-crystalline thermoplastic polyester. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A carrier head for chemical mechanical polishing, comprising:
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a base; a mounting assembly attached to the base having a surface for contacting a substrate; and a retainer having an upper portion configured to be secured to a base and a lower portion having a bottom surface to contact a polishing pad during polishing, wherein the lower portion includes a semi-crystalline thermoplastic polyester. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification