MEMS SENSOR WITH BUILT-IN SELF-TEST

• US 20100145660A1
• Filed: 12/08/2008
• Published: 06/10/2010
• Est. Priority Date: 12/08/2008
• Status: Abandoned Application

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Petkov, Valdimir, Lang, Christoph, Gomez, Udo-Martin
• Application Number:
  US12/329,823
• Publication Number:
  US 20100145660A1
• Time in Patent Office: Days
• US Class Current: 702/193
• CPC Class Codes: G01D 2218/10 Testing of sensors or measuring arrangements
• CPC Class Codes: G01D 3/08 with provision for safeguarding the apparatus, e.g. against abnormal operation, against breakdown
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups
• CPC Class Codes: G01R 31/31702 Testing digital circuits including elements other than semiconductor transistors, e.g. biochips, nanofabrics, mems, chips with magnetic elements

Abstract

A method and system for testing a MEMS sensor element during operation of a MEMS sensor system in one embodiment includes a test signal generator configured to generate a broad frequency band test signal, and a verification signal substantially identical to the test signal, a microelectrical-mechanical system (MEMS) sensor element operatively connected to the test signal generator for generating a sensor output in response to the test signal, a comparison component configured to generate an evaluation signal output based upon the verification signal and the test signal, and an evaluation circuit operatively connected to the comparison component and configured to identify a mismatch between the verification signal and the sensor output based upon the evaluation signal.

Claims

1. A MEMS sensor system comprising:

a test signal generator configured to generate a broad frequency band test signal, and a verification signal substantially identical to the test signal;

a microelectrical-mechanical system (MEMS) sensor element operatively connected to the test signal generator for generating a sensor output in response to the test signal;

a comparison component configured to generate an evaluation signal output based upon the verification signal and the test signal; and

an evaluation circuit operatively connected to the comparison component and configured to identify a mismatch between the verification signal and the sensor output based upon the evaluation signal.

2. The system of claim 1, wherein the test signal generator comprises a pseudo random noise generator, the system further comprising:

a band pass filter operably positioned between the test signal generator and the MEMS sensor element to limit the frequency band of the test signal.

3. The system of claim 2, further comprising:

a digital to analog converter, operably positioned between the band pass filter and the MEMS sensor element to convert a digital signal from the test signal generator to an analog signal.

4. The system of claim 1, further comprising:

a readout circuit operably connected to the MEMS sensor element and the comparison component; and

a phase shifting circuit operably connected to the test signal generator and the comparison component.

5. The system of claim 4, further comprising:

a band pass filter operably positioned between the test signal generator and both the MEMS sensor element and the phase shifting circuit, to limit the frequency band of the test signal.

6. The system of claim 4, further comprising:

a low pass filter operably connected to the readout circuit, the low pass filter configured with a high frequency cutoff that is lower than the frequency band of the test signal; and

a control circuit operably connected to the low pass filter.

19. The system of claim 1, further comprising:

a readout circuit operably connected to the MEMS sensor element and the comparison component; and

a phase shifting circuit operably connected to the test signal generator and the comparison component.

20. The system of claim 19, further comprising:

a band pass filter operably positioned between the test signal generator and both the MEMS sensor element and the phase shifting circuit, to limit the frequency band of the test signal.

7. A method of evaluating the response of a sensor element comprising:

configuring a microelectrical-mechanical system (MEMS) sensor element to monitor a condition;

applying a broad frequency band test signal to the MEMS sensor element;

generating a sensor output based upon the test signal and the monitored condition;

filtering the sensor output to remove signal components associated with the test signal;

outputting the filtered sensor output to a control circuit;

comparing a verification signal to the sensor output; and

identifying mismatches between the verification signal and the sensor output based upon the comparison.

8. The method of claim 7, wherein comparing comprises:

subtracting the verification signal from the sensor output.

9. The method of claim 7, wherein comparing comprises:

correlating the verification signal with the sensor output;

10. The method of claim 9, further comprising:

comparing the mismatches with a threshold.

11. The method of claim 7, further comprising:

generating the broad frequency band test signal with a pseudo random noise generator; and

filtering the broad frequency band test signal with a band pass filter prior to applying the broad frequency band test signal to the MEMS sensor element.

12. The method of claim 11, further comprising:

converting a filtered broad frequency band digital test signal to a filtered broad frequency band analog test signal.

13. The method of claim 7, further comprising:

phase shifting the verification signal prior to comparing the verification signal to the sensor output.

14. A MEMS sensor system comprising:

a test signal generator configured to generate a broad frequency band test signal, and a verification signal substantially identical to the test signal;

a microelectrical-mechanical system (MEMS) sensor element operatively connected to a monitored system and the test signal generator for generating a sensor output in response to the test signal and a sensed condition of the monitored system;

a comparison component configured to generate an evaluation signal output based upon the verification signal and the test signal;

an evaluation circuit operatively connected to the comparison component and configured to identify a mismatch between the verification signal and the sensor output based upon the evaluation signal; and

a control circuit operatively connected to the MEMS sensor element for controlling the monitored system in response to the sensed condition.

15. The system of claim 14, wherein the MEMS sensor element comprises a proof mass.

16. The system of claim 14, wherein the monitored system is an airbag deployment system.

17. The system of claim 14, wherein the test signal generator comprises a pseudo random noise generator, the system further comprising:

a band pass filter operably positioned between the test signal generator and the MEMS sensor element to limit a frequency spectrum of the broad frequency band test signal.

18. The system of claim 17, further comprising:

a digital to analog converter, operably positioned between the band pass filter and the MEMS sensor element to convert a digital signal from the test signal generator to an analog signal.