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METHOD FOR PRODUCING A VACUUM MEASURING CELL OF THE MEMBRANE TYPE

  • US 20100146771A1
  • Filed: 03/25/2008
  • Published: 06/17/2010
  • Est. Priority Date: 04/07/2007
  • Status: Active Grant
First Claim
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1. Method for the production of a vacuum measuring cell (8) with a diaphragm (2) as pressure transducer, wherein on the one side of the diaphragm (2) spaced apart is disposed a first housing plate (1) in the margin region with a joining means (3) forming a seal, such that between them a reference vacuum chamber (7) is formed, and that on the other side of the diaphragm (2) spaced apart a second housing plate (4) is disposed in the margin region with a joining means (3) forming a seal, such that between them a measuring vacuum chamber (9) is formed, and that the second housing plate (4) includes an opening and, communicating with such opening and the measuring vacuum chamber (9), connection means (5) with joining means (6) are disposed forming a seal for the joining of the measuring vacuum chamber (9) with the medium to be measured, wherein at least the diaphragm (2) and the two housing plates (1, 4) are realized as ceramic parts (1, 2, 4) of an aluminum oxide, characterized in that for at least one of the joining means (3, 6) aluminum with a thickness in the range from 0.5 μ

  • m to 30 μ

    m is disposed in the joining region between the ceramic parts (1, 2, 4) to be joined, and that the ceramic parts (1, 2, 4) to be joined are pressed together at increased temperature in the range from 600°

    C. to 680°

    C. in a process gas atmosphere encompassing the parts, which atmosphere includes a reducing gas, during a time in the range from 30 to 90 minutes, and that subsequently a tempering step is carried out in a second process gas atmosphere which includes oxygen, wherein the tempering takes place in a temperature range from 450°

    C. to 575°

    C. such that the metallic aluminum is substantially oxidized to aluminum oxide.

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