×

Multiple-Substrate Transfer Apparatus and Multiple-Substrate Processing Apparatus

  • US 20100147396A1
  • Filed: 12/15/2008
  • Published: 06/17/2010
  • Est. Priority Date: 12/15/2008
  • Status: Abandoned Application
First Claim
Patent Images

1. A multiple-substrate processing apparatus comprising:

  • a reaction chamber comprised of two discrete reaction stations for simultaneously processing two substrates, said reaction stations being aligned along a substrate-loading/unloading direction;

    a transfer chamber disposed underneath the reaction chamber, for loading and unloading substrates to and from the reaction stations;

    a load lock chamber disposed next to the transfer chamber, said load lock chamber being provided with a transfer arm for loading and unloading substrates to and from the transfer chamber, said transfer arm comprising one or more end-effectors for simultaneously supporting two substrates one behind the other as viewed in the substrate-loading/unloading direction; and

    a transfer robot disposed in the vicinity of the load lock chamber, for loading and unloading substrates to and from the transfer arm.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×