NANOTUBE ESD PROTECTIVE DEVICES AND CORRESPONDING NONVOLATILE AND VOLATILE NANOTUBE SWITCHES

• US 20100147657A1
• Filed: 08/07/2009
• Published: 06/17/2010
• Est. Priority Date: 11/02/2004
• Status: Abandoned Application

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Ward, Jonathan W., Sivarajan, Ramesh, Rueckes, Thomas, Sen, Rahul
• Application Number:
  US12/537,651
• Publication Number:
  US 20100147657A1
• Time in Patent Office: Days
• US Class Current: 200/181
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G11C 13/025 using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
• CPC Class Codes: G11C 17/16 using electrically-fusible links
• CPC Class Codes: G11C 17/165 Memory cells which are electrically programmed to cause a change in resistance, e.g. to permit multiple resistance steps to be programmed rather than conduct to or from non-conduct change of fuses and antifuses digital stores using resistance random access memory elements G11C13/0002
• CPC Class Codes: G11C 2213/17 Memory cell being a nanowire transistor
• CPC Class Codes: G11C 23/00 Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
• CPC Class Codes: H01H 1/0094 Switches making use of nanoelectromechanical systems [NEMS]
• CPC Class Codes: H01L 2224/023 Redistribution layers [RDL] for bonding areas
• CPC Class Codes: H01L 2224/13099 Material
• CPC Class Codes: H01L 2224/131 with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
• CPC Class Codes: H01L 2224/16 of an individual bump connector
• CPC Class Codes: H01L 23/60 Protection against electrostatic charges or discharges, e.g. Faraday shields
• CPC Class Codes: H01L 23/62 Protection against overvoltage, e.g. fuses, shunts
• CPC Class Codes: H01L 24/16 of an individual bump connector
• CPC Class Codes: H01L 27/0248 for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
• CPC Class Codes: H01L 27/0251 for MOS devices
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0001 Technical content checked by a classifier
• CPC Class Codes: H01L 2924/01012 Magnesium [Mg]
• CPC Class Codes: H01L 2924/01019 Potassium [K]
• CPC Class Codes: H01L 2924/0102 : Calcium [Ca]
• CPC Class Codes: H01L 2924/01025 : Manganese [Mn]
• CPC Class Codes: H01L 2924/01046 : Palladium [Pd]
• CPC Class Codes: H01L 2924/01066 : Dysprosium [Dy]
• CPC Class Codes: H01L 2924/01077 : Iridium [Ir]
• CPC Class Codes: H01L 2924/01079 : Gold [Au]
• CPC Class Codes: H01L 2924/014 : Solder alloys
• CPC Class Codes: H01L 2924/09701 : Low temperature co-fired ceramic [LTCC]
• CPC Class Codes: H01L 2924/12043 : Photo diode
• CPC Class Codes: H01L 2924/12044 : OLED
• CPC Class Codes: H01L 2924/19041 : being a capacitor
• CPC Class Codes: H01L 2924/19043 : being a resistor
• CPC Class Codes: H01L 2924/19103 : interposed between the semiconductor or solid-state device and the die mounting substrate, i.e. chip-on-passive
• CPC Class Codes: H01L 2924/19104 : on the semiconductor or solid-state device, i.e. passive-on-chip
• CPC Class Codes: H01L 2924/30105 : Capacitance
• CPC Class Codes: H05K 1/0259 : Electrostatic discharge [ESD] protection
• CPC Class Codes: H10K 85/221 : Carbon nanotubes

Abstract

Device design methods for use with non-volatile nanotube switches are disclosed. In a first aspect of the present disclosure, a plurality of nonconductive nanoparticles is adhered to a nanotube element such as to provide an isolation barrier from a control electrode and further provide a switching gap above that element. In a second aspect of the present disclosure, conductive nanoparticles are dispersed and adhered to either a control electrode or to a nanotube element positioned over said electrode element such that the interface area (that is, the area of the nanotube element which comes into contact with the control electrode) is minimized. In a third aspect of the present disclosure, a monolayer network of nonconductive nanotubes is used to provide an isolation barrier between a control electrode and a nanotube element. Voids or spaces in said monolayer network further provides switching gaps.

Claims

1. A nanotube switch, comprising:

a substrate;

a first and second electrodes;

a control electrode positioned between the first and second electrodes;

a plurality of non-conductive nanoparticles on the substrate and defining a gap over the control electrode in which gap there are no nanoparticles;

a switching element comprising a plurality of nanotubes positioned above the substrate, the control electrode and the plurality of nanoparticles wherein the switching element is electrically coupled to the first and second electrodes; and

wherein the switching element is deflectable towards the control electrode to contact the control electrode through the gap in response to electrical stimulus applied to the control electrode and at least one of the first and second electrodes.

2. The nanotube switch of claim 1 wherein the switching element switches between a de-activated state and an activated state in response to the electrical stimulus applied to the control electrode and at least one of the first and second electrodes.

3. The nanotube switch of claim 2 further comprising a release electrode substantially opposite the control electrode wherein the switching element switches between the activated state and the de-activated state in response to electrical stimulus applied to the release electrode and at least one of the first and second electrodes.

4. The nanotube switch of claim 3 further comprising an insulator covering at least part of the release electrode along a surface situated adjacent to the switch element.

5. The nanotube switch of claim 4 wherein the nanotube switch is non-volatile.

6. The nanotube switch of claim 1 wherein the nanotube switch is volatile.

7. The nanotube switch of claim 1 wherein the nanotubes are single-walled nanotubes.

8. The nanotube switch of claim 1 wherein the nanotubes are multi-walled nanotubes.

9. The nanotube switch of claim 1 wherein the non-conductive nanoparticles support the switching element.

10. A nanotube switch, comprising:

a substrate;

a first and second electrodes;

a control electrode positioned between the first and second electrodes;

a plurality of conductive nanoparticles on the substrate; and

a switching element comprising a plurality of nanotubes positioned above the substrate, the control electrode and the plurality of nanoparticles wherein the switching element is electrically coupled to the first and second electrodes; and

wherein the switching element is deflectable towards the control electrode to contact the conductive nanoparticles in response to electrical stimulus applied to the control electrode and at least one of the first and second electrodes.

11. The nanotube switch of claim 10 wherein the switching element switches between a de-activated state and an activated state in response to the electrical stimulus applied to the control electrode and at least one of the first and second electrodes.

12. The nanotube switch of claim 11 further comprising a release electrode substantially opposite the control electrode wherein the switching element switches between the activated state and the de-activated state in response to electrical stimulus applied to the release electrode and at least one of the first and second electrodes.

13. The nanotube switch of claim 12 further comprising an insulator covering at least part of the release electrode along a surface situated adjacent to the switch element.

14. The nanotube switch of claim 13 wherein the nanotube switch is non-volatile.

15. The nanotube switch of claim 10 wherein the nanotube switch is volatile.

16. The nanotube switch of claim 10 wherein the nanotubes are single-walled nanotubes.

17. The nanotube switch of claim 10 wherein the nanotubes are multi-walled nanotubes.

18. A nanotube switch, comprising:

a substrate;

a first and second electrodes;

a control electrode positioned between the first and second electrodes;

a first plurality of conductive nanoparticles on the substrate; and

a switching element comprising a plurality of nanotubes positioned above the substrate, the control electrode and the first plurality of conductive nanoparticles, wherein the switching element is electrically coupled to the first and second electrodes;

a release electrode above the switching element substantially opposite the control electrode said release electrode having a surface adjacent to the switching element; and

a second plurality of conductive nanoparticles adhered on the release electrode surface adjacent to the switching element;

wherein the switching element is deflectable towards the control electrode switching between a de-activated state and a first activated state in response to electrical stimulus applied to the control electrode and at least one of the first and second electrodes;

wherein the switching element is deflectable towards the release electrode switching between the de-activated state and a second activated state in response to electrical stimulus applied to the release electrode and at least one of the first and second electrodes.

19. A nanotube switch, comprising:

a substrate;

a first and second electrodes;

a control electrode positioned between the first and second electrodes;

a plurality of non-conductive nanotubes on the substrate wherein the non-conductive nanotubes define at least one gap over the control electrode in which at least one gap there are no non-conductive nanotubes;

a switching element comprising a plurality of conductive nanotubes positioned above the substrate, the control electrode and the plurality of non-conductive nanotubes wherein the switching element is electrically coupled to the first and second electrodes; and

wherein the switching element is deflectable towards the control electrode to contact the control electrode through the at least one gap in response to electrical stimulus applied to the control electrode and at least one of the first and second electrodes.

20. The nanotube switch of claim 19 wherein the switching element switches between a de-activated state and an activated state in response to the electrical stimulus applied to the control electrode and at least one of the first and second electrodes.

21. The nanotube switch of claim 20 further comprising a release electrode substantially opposite the control electrode wherein the switching element switches between the activated state and the de-activated state in response to electrical stimulus applied to the release electrode and at least one of the first and second electrodes.

22. The nanotube switch of claim 21 further comprising an insulator covering at least part of the release electrode along a surface situated adjacent to the switch element.

23. The nanotube switch of claim 22 wherein the nanotube switch is non-volatile.

24. The nanotube switch of claim 19 wherein the nanotube switch is volatile.

25. The nanotube switch of claim 19 wherein the nanotubes are single-walled nanotubes.

26. The nanotube switch of claim 19 wherein the nanotubes are multi-walled nanotubes.

27. The nanotube switch of claim 19 wherein the plurality of non-conductive nanotubes supports the switching element.

28. A nanotube switch, comprising:

a substrate;

a first and second electrodes;

a control electrode positioned between the first and second electrodes;

a plurality of non-conductive nanoparticles on the substrate and defining a gap over the control electrode in which there are no non-conductive nanoparticles;

a plurality of conductive nanoparticles on the substrate and in the gap;

a switching element comprising a plurality of nanotubes positioned above the substrate, the control electrode, the plurality of non-conductive nanoparticles, and the plurality of conductive nanoparticles wherein the switching element is electrically coupled to the first and second electrodes; and

wherein the switching element is deflectable towards the control electrode to contact the conductive nanoparticles through the gap in response to electrical stimulus applied to the control electrode and at least one of the first and second electrodes.

29. The nanotube switch of claim 28 wherein the switching element switches between a de-activated state and an activated state in response to the electrical stimulus applied to the control electrode and at least one of the first and second electrodes.

30. The nanotube switch of claim 29 further comprising a release electrode substantially opposite the control electrode wherein the switching element switches between the activated state and the de-activated state in response to electrical stimulus applied to the release electrode and at least one of the first and second electrodes.

31. The nanotube switch of claim 30 further comprising an insulator covering at least part of the release electrode along a surface situated adjacent to the switch element.

32. The nanotube switch of claim 31 wherein the nanotube switch is non-volatile.

33. The nanotube switch of claim 28 wherein the nanotube switch is volatile.

34. The nanotube switch of claim 28 wherein the nanotubes are single-walled nanotubes.

35. The nanotube switch of claim 28 wherein the nanotubes are multi-walled nanotubes.

36. The nanotube switch of claim 28 wherein the non-conductive nanoparticles support the switching element.

37. A nanotube switch, comprising:

a substrate;

a first and second electrodes;

a control electrode positioned between the first and second electrodes;

a plurality of non-conductive nanotubes on the substrate wherein the non-conductive nanotubes define at least one gap over the control electrode in which at least one gap there are no non-conductive nanotubes;

a plurality of conductive nanoparticles on the substrate and in the gap;

a switching element comprising a plurality of conductive nanotubes positioned above the substrate, the control electrode, the plurality of non-conductive nanotubes and the plurality of conductive nanoparticles wherein the switching element is electrically coupled to the first and second electrodes; and

wherein the switching element is deflectable towards the control electrode to contact the conductive nanoparticles through the at least one gap in response to electrical stimulus applied to the control electrode and at least one of the first and second electrodes.

38. The nanotube switch of claim 37 wherein the switching element switches between a de-activated state and an activated state in response to the electrical stimulus applied to the control electrode and at least one of the first and second electrodes.

39. The nanotube switch of claim 38 further comprising a release electrode substantially opposite the control electrode wherein the switching element switches between the activated state and the de-activated state in response to electrical stimulus applied to the release electrode and at least one of the first and second electrodes.

40. The nanotube switch of claim 39 further comprising an insulator covering at least part of the release electrode along a surface situated adjacent to the switch element.

41. The nanotube switch of claim 40 wherein the nanotube switch is non-volatile.

42. The nanotube switch of claim 37 wherein the nanotube switch is volatile.

43. The nanotube switch of claim 37 wherein the nanotubes are single-walled nanotubes.

44. The nanotube switch of claim 37 wherein the nanotubes are multi-walled nanotubes.

45. The nanotube switch of claim 37 wherein the nonconductive nanotubes support the switching element.