ILLUMINATION DEVICE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS, AND MICROLITHOGRAPHIC PROJECTION EXPOSURE METHOD
First Claim
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1. An illumination device of a microlithographic projection exposure apparatus, comprising:
- a deflection device configured to variably deflect at least two light beams impinging on the deflection device independently of one another by variation of the deflection angle in each case in such a way that each of said light beams are directed onto at least one location in a pupil plane of the illumination device via at least two different beam paths,wherein, on said beam paths, at least one optical property of the respective light beam is influenced differently relative to the beam paths.
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Abstract
Illumination devices of a microlithographic projection exposure apparatus, include a deflection device with which at least two light beams impinging on the deflection device can be variably deflected independently of one another by variation of the deflection angle in each case in such a way that each of the light beams can be directed onto at least one location in a pupil plane of the illumination device via at least two different beam paths; wherein, on the beam paths, at least one optical property of the respective light beam is influenced differently.
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Citations
19 Claims
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1. An illumination device of a microlithographic projection exposure apparatus, comprising:
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a deflection device configured to variably deflect at least two light beams impinging on the deflection device independently of one another by variation of the deflection angle in each case in such a way that each of said light beams are directed onto at least one location in a pupil plane of the illumination device via at least two different beam paths, wherein, on said beam paths, at least one optical property of the respective light beam is influenced differently relative to the beam paths. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 19)
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18. A microlithographic projection exposure method, comprising:
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illuminating an object plane of a projection objective with an illumination device; and imaging the object plane into an image plane of the projection objective with the projection objective, wherein during the illuminating, light beams impinging on a deflection device provided in the illumination device are deflected by a deflection angle that can be set in variable fashion, and different illumination settings are set in a pupil plane of the illumination device by sole variation of deflection angles produced by the deflection device.
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Specification