DIGITAL MICRO-MIRROR DEVICE
First Claim
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1. A digital micro-mirror device comprising an array of micro-mirror assemblies positioned on a substrate, each micro-mirror assembly comprising:
- a mirror spaced apart from the substrate, said mirror having an upper reflective surface and a lower support surface;
a stem supporting said mirror, said stem extending from said substrate to said lower support surface, said stem defining a tilt axis for said mirror;
a first electrode and a second electrode, said first and second electrodes being positioned on either side of said stem, each electrode being individually addressable via electronic circuitry in said substrate,wherein said stem is comprised of a resiliently flexible material, such that said mirror can tilt either towards said first electrode or towards said second electrode by an electrostatic force.
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Abstract
A digital micro-mirror device comprising an array of micro-mirror assemblies positioned on a substrate. Each micro-mirror assembly comprises: a mirror spaced apart from the substrate; a stem supporting the mirror; and first and second electrodes positioned on either side of the stem. The stem is comprised of a resiliently flexible material, such that the mirror can tilt either towards the first electrode or towards the second electrode by an electrostatic force. The digital micro-mirror device may be used in data projectors and the like.
15 Citations
20 Claims
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1. A digital micro-mirror device comprising an array of micro-mirror assemblies positioned on a substrate, each micro-mirror assembly comprising:
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a mirror spaced apart from the substrate, said mirror having an upper reflective surface and a lower support surface; a stem supporting said mirror, said stem extending from said substrate to said lower support surface, said stem defining a tilt axis for said mirror; a first electrode and a second electrode, said first and second electrodes being positioned on either side of said stem, each electrode being individually addressable via electronic circuitry in said substrate, wherein said stem is comprised of a resiliently flexible material, such that said mirror can tilt either towards said first electrode or towards said second electrode by an electrostatic force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification