MICROELECTROMECHANICAL GYROSCOPE WITH ENHANCED REJECTION OF ACCELERATION NOISES
First Claim
1. An integrated microelectromechanical structure, comprising:
- a substrate;
a driving mass configured to be actuated in a plane with a driving movement;
first and second elastic anchorage elements anchoring the driving mass to the substrate;
first and second elastic supporting elements;
a first sensing mass and a second sensing mass suspended within said driving mass and respectively coupled to the driving mass via the first and second elastic supporting elements, respectively, the sensing masses being configured to move with said driving mass in said driving movement and being configured to perform respective detection movements in response to an angular movement of the driving mass; and
elastic coupling elements coupling the sensing masses to each other and configured to couple modes of vibration of the sensing masses.
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Abstract
An integrated microelectromechanical structure is provided with a driving mass, anchored to a substrate via elastic anchorage elements and designed to be actuated in a plane with a driving movement; and a first sensing mass and a second sensing mass, suspended within, and coupled to, the driving mass via respective elastic supporting elements so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first and the second sensing masses are connected together via elastic coupling elements, configured to couple their modes of vibration.
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Citations
20 Claims
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1. An integrated microelectromechanical structure, comprising:
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a substrate; a driving mass configured to be actuated in a plane with a driving movement; first and second elastic anchorage elements anchoring the driving mass to the substrate; first and second elastic supporting elements; a first sensing mass and a second sensing mass suspended within said driving mass and respectively coupled to the driving mass via the first and second elastic supporting elements, respectively, the sensing masses being configured to move with said driving mass in said driving movement and being configured to perform respective detection movements in response to an angular movement of the driving mass; and elastic coupling elements coupling the sensing masses to each other and configured to couple modes of vibration of the sensing masses. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An electronic device comprising:
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an integrated microelectromechanical structure that includes; a substrate; a driving mass configured to be actuated in a plane with a driving movement; first and second elastic anchorage elements anchoring the driving mass to the substrate; first and second elastic supporting elements; a first sensing mass and a second sensing mass suspended within said driving mass and respectively coupled to the driving mass via the first and second elastic supporting elements, respectively, the sensing masses being configured to move with said driving mass in said driving movement and being configured to perform respective detection movements in response to an angular movement of the driving mass; and elastic coupling elements coupling the sensing masses to each other and configured to couple modes of vibration of the sensing masses; and a reading stage operatively coupled to said integrated microelectromechanical structure. - View Dependent Claims (15, 16)
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17. A method, comprising:
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forming an integrated micromechanical structure, the forming including; forming a driving mass configured to be actuated in a plane with a driving movement; forming first and second elastic anchorage elements anchoring the driving mass to a substrate; forming first and second elastic supporting elements; forming a first sensing mass and a second sensing mass suspended within said driving mass and respectively coupled to the driving mass via the first and second elastic supporting elements, respectively, the sensing masses being configured to move with said driving mass in said driving movement and being configured to perform respective detection movements in response to an angular movement of the driving mass; and forming elastic coupling elements coupling the sensing masses to each other and configured to couple modes of vibration of the sensing masses. - View Dependent Claims (18, 19, 20)
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Specification