Microsystem, More Particularly a Microgyrometer, With at Least Two Mechanically Coupled Oscillating Masses

• US 20100154543A1
• Filed: 12/22/2006
• Published: 06/24/2010
• Est. Priority Date: 12/23/2005
• Status: Active Grant

• Current Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Original Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Inventors: Diem, Bernard
• Granted Patent: US 8,011,244 B2
• Time in Patent Office: Days
• US Class Current: 73/504.140
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: H03H 9/02338 Suspension means

Abstract

The microsystem achieved in a flat substrate and comprises two oscillating masses connected to the substrate by suspension springs. The oscillating masses are coupled by a rigid coupling bar so as to produce an anti-phase movement of said oscillating masses when excitation of the latter is performed in a predefined excitation direction. The coupling bar is connected to intermediate zones of the corresponding suspension springs arranged on opposite sides of the oscillating masses. The intermediate zones are arranged between a first end of the suspension springs fixed to the corresponding oscillating mass, and a second end of the suspension springs fixed to the substrate by a corresponding anchoring point.

Claims

1. A microsystem made in a flat substrate and comprising:

at least two oscillating masses connected to the substrate by elastic suspension means,

and means for coupling two adjacent oscillating masses able to produce an anti-phase movement of said oscillating masses when excitation of the latter is performed in a predefined excitation direction,

a microsystem wherein;

said microsystem comprises at least one pair of elastic suspension means arranged on opposite sides of two adjacent oscillating masses and having an axis of least stiffness oriented in said excitation direction,

said coupling means connect intermediate zones of said pair of elastic suspension means,

each intermediate zone is arranged between a first end of the associated elastic suspension means fixed onto the corresponding oscillating mass, and a second end of the associated elastic suspension means fixed onto the substrate by a corresponding anchoring point,

said intermediate zones, connected by the coupling means, are arranged on each side of an axis parallel to the excitation direction.

2. The microsystem according to claim 1, wherein each intermediate zone is formed by a mobile end of a last branch of the associated elastic suspension means said last branch being fixed to the corresponding anchoring point.

3. The microsystem according to claim 1, wherein said coupling means comprise a rigid coupling bar articulated in rotation around a pivot firmly secured to the substrate and comprising two sections respectively connected to the intermediate zones of the associated elastic suspension means.

4. The microsystem according to claim 3, wherein the coupling bar comprises:

a rigid frame on which the sections of the bar are fixed, the pivot being arranged in the centre of the frame,

and articulation springs arranged inside the frame and each comprising at least one first end connected to the frame and at least one second end connected to the pivot.

5. The microsystem according to claim 4, wherein the coupling bar comprises at least two first articulation springs arranged on each side of the pivot and having an axis of least stiffness oriented perpendicularly to the excitation direction.

6. The microsystem according to claim 5, wherein the coupling bar comprises two second articulation springs, arranged on each side of the pivot, perpendicularly to the first articulation springs, and having an axis of least stiffness oriented in the excitation direction.

7. The microsystem according to claim 4, wherein the articulation springs are springs in the form of meanders.

8. The microsystem according to claim 1, wherein the opposite sides of two adjacent oscillating masses each comprise two elastic suspension means arranged facing one another.

9. The microsystem according to claim 8, wherein the anchoring points of the elastic suspension means arranged facing one another are situated on each side of the axis parallel to the excitation direction, passing through the centre of the elastic suspension means arranged facing one another, and the coupling means connect the intermediate zones of each pair of elastic suspension means arranged facing one another.

10. The microsystem according to claim 8, wherein the anchoring points of the elastic suspension means arranged facing one another face one another on the same side of the axis parallel to the excitation direction and the coupling means connect the intermediate zones of the elastic suspension means arranged on each side of said axis, which passes substantially through the centre of the microsystem.

11. The microsystem according to claim 1, wherein the elastic suspension means are suspension springs in the form of meanders.