CAPACITANCE DIAPHRAGM GAUGE AND VACCUM APPARATUS

• US 20100154552A1
• Filed: 12/23/2009
• Published: 06/24/2010
• Est. Priority Date: 12/24/2008
• Status: Abandoned Application

• Current Assignee: Canon Anelva Corporation (Canon Inc.)
• Original Assignee: Canon Anelva Technix Corp (Canon Inc.)
• Inventors: Miyashita, Haruzo
• Application Number:
  US12/645,586
• Publication Number:
  US 20100154552A1
• Time in Patent Office: Days
• US Class Current: 73/718
• CPC Class Codes: G01L 19/02 Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means for aneroid barometers G01L7/14
• CPC Class Codes: G01L 9/0072 using variations in capacitance

Abstract

A capacitance diaphragm gauge includes an inclination angle sensor which detects the inclination angle of the gauge. The pressure dependences of capacitance obtained when the capacitance diaphragm gauge is mounted on a vacuum apparatus at the first inclination angle (+90°), the second inclination angle (0°), and the third inclination angle (−90°) are stored in a storage unit in advance. A pressure measurement value is then corrected based on the inclination angle information detected by the inclination angle sensor and the capacitance-pressure characteristic data is actually measured at the first, second and third inclination angles, and stored in the gauge.

Claims

1. A capacitance diaphragm gauge comprising:

a vacuum sealed chamber including a diaphragm electrode;

a fixed electrode provided inside said vacuum sealed chamber so as to face the diaphragm electrode; and

an inclination angle sensor configured to detect an inclination angle of the capacitance diaphragm gauge.

2. The gauge according to claim 1, further comprising:

a capacitance detection unit configured to detect a capacitance between the diaphragm electrode and said fixed electrode;

a storage unit configured to store a pressure dependence of capacitance between the diaphragm electrode and said fixed electrode on a predetermined inclination angle; and

a pressure correction unit configured to correct a pressure at an inclination angle associated with the inclination angle information, based on the inclination angle information detected by said inclination angle sensor and the pressure dependence of capacitance stored in said storage unit.

3. The gauge according to claim 2, wherein the predetermined inclination angle includes a first inclination angle corresponding to a horizontal direction, a second inclination angle corresponding to a vertically upward direction, and a third inclination angle corresponding to a vertically downward direction.

4. The gauge according to claim 2, wherein said storage unit stores the pressure dependence of capacitance at the predetermined inclination angle in a pressure range wider than an operating pressure range of the capacitance diaphragm gauge.

5. The gauge according to claim 2, wherein

the predetermined inclination angle includes a first inclination angle corresponding to a horizontal direction and a second inclination angle which differs from the first inclination angle by 90°

, and

said pressure correction unit corrects the pressure at an inclination angle associated with the inclination angle information between the first inclination angle and the second inclination angle, based on the pressure dependences at the two inclination angles.

6. A vacuum apparatus comprising a capacitance diaphragm gauge defined in claim 1.