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CAPACITANCE DIAPHRAGM GAUGE AND VACCUM APPARATUS

  • US 20100154552A1
  • Filed: 12/23/2009
  • Published: 06/24/2010
  • Est. Priority Date: 12/24/2008
  • Status: Abandoned Application
First Claim
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1. A capacitance diaphragm gauge comprising:

  • a vacuum sealed chamber including a diaphragm electrode;

    a fixed electrode provided inside said vacuum sealed chamber so as to face the diaphragm electrode; and

    an inclination angle sensor configured to detect an inclination angle of the capacitance diaphragm gauge.

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