Apparatus for Measuring a Mechanical Quantity
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Abstract
An apparatus structure and measurement method are provided to retain high precision and high reliability of a semiconductor mechanical quantity measuring apparatus which senses a mechanical quantity and transmits measured information wirelessly. As to a silicon substrate of the semiconductor mechanical quantity measuring apparatus, for example, a ratio of a substrate thickness to a substrate length along a measurement direction is set small, and a ratio of a substrate thickness to a substrate length along a direction perpendicular to the measurement direction is set small. The apparatus upper surface is covered with a protective member. It is possible to measure a strain along a particular direction and realize mechanical quantity measurement with less error and high precision. An impact resistance and environment resistance of the apparatus itself can be improved.
19 Citations
13 Claims
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1-10. -10. (canceled)
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11. A mechanical quantity measuring apparatus having a strain detector formed on a single crystal semiconductor substrate for detecting a strain and bonded to or buried in an object to be measured to measure a strain, comprising:
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an amplifier circuit disposed on a principal surface of the single crystal semiconductor substrate for amplifying a signal of the strain detector, and a communication control unit for transmitting a signal amplified by the amplifier circuit, the communication control unit disposed on the principal surface of the single crystal semiconductor substrate toward a periphery of the mechanical quantity measuring apparatus, wherein the strain detector includes a Wheatstone bridge circuit disposed on the principal surface, along with a pair of sensor resistor layers and a pair of dummy resistors, wherein a resistance value of each sensor resistor layer being equal to a resistance value of each dummy resistor, wherein the strain detector is located closer to a central part of the principal surface of the single crystal semiconductor substrate than both the amplifying circuit and the communication control unit. - View Dependent Claims (12, 13)
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Specification