Microprobe Tips and Methods for Making
First Claim
1. A method for creating a contact structure, comprising:
- forming compliant probe structure electrochemically; and
forming a contact tip having a desired configuration, wherein the contact tip is formed on the compliant probe structure.
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Abstract
Embodiments of the present invention are directed to the formation of microprobe tips elements having a variety of configurations. In some embodiments tips are formed from the same building material as the probes themselves, while in other embodiments the tips may be formed from a different material and/or may include a coating material. In some embodiments, the tips are formed before the main portions of the probes and the tips are formed in proximity to or in contact with a temporary substrate. Probe tip patterning may occur in a variety of different ways, including, for example, via molding in patterned holes that have been isotropically or anisotropically etched silicon, via molding in voids formed in exposed photoresist, via molding in voids in a sacrificial material that have formed as a result of the sacrificial material mushrooming over carefully sized and located regions of dielectric material, via isotropic etching of the tip material around carefully sized and placed etching shields, via hot pressing, and the like.
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Citations
11 Claims
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1. A method for creating a contact structure, comprising:
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forming compliant probe structure electrochemically; and forming a contact tip having a desired configuration, wherein the contact tip is formed on the compliant probe structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for creating a contact structure, comprising:
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forming compliant probe structure from a plurality of adhered layers of deposited conductive material; and forming a contact tip having a desired configuration, wherein the contact tip is formed on the compliant probe structure.
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Specification