Exposure apparatus and device manufacturing method
First Claim
1. An exposure apparatus for emitting exposure light onto a substrate via a projection optical system and a liquid so as to expose the substrate, the apparatus comprising:
- a supply pipe which supplies the liquid;
a temperature regulation apparatus which is connected to the supply pipe and performs temperature regulation of the liquid supplied to the supply pipe, wherein the temperature regulation apparatus has a rough temperature regulator which roughly regulates the temperature of the liquid, and a fine temperature regulator which is arranged between the rough temperature regulator and the supply pipe and performs fine regulation of the temperature of the liquid; and
and a degassing apparatus which is arranged between the rough temperature regulator and the fine temperature regulator and reduces a gas dissolution concentration in the liquid.
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Accused Products
Abstract
An exposure apparatus for emitting exposure light onto a substrate via a projection optical system and a liquid to expose the substrate includes a supply pipe which supplies the liquid; a recovery pipe which recovers the liquid; a connection pipe which connects the supply pipe and the recovery pipe; and a switching device which switches a flow path of the liquid so that when liquid supply is stopped, the liquid that has flowed into the supply pipe flows to the recovery pipe via the connection pipe. The apparatus may further include a temperature regulation apparatus connected to the supply pipe, which performs temperature regulation of the liquid supplied to the supply pipe, and has a rough temperature regulator which roughly regulates the temperature of the liquid, and a fine temperature regulator which is arranged between the rough temperature regulator and the supply pipe and performs fine regulation of this temperature.
21 Citations
9 Claims
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1. An exposure apparatus for emitting exposure light onto a substrate via a projection optical system and a liquid so as to expose the substrate, the apparatus comprising:
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a supply pipe which supplies the liquid; a temperature regulation apparatus which is connected to the supply pipe and performs temperature regulation of the liquid supplied to the supply pipe, wherein the temperature regulation apparatus has a rough temperature regulator which roughly regulates the temperature of the liquid, and a fine temperature regulator which is arranged between the rough temperature regulator and the supply pipe and performs fine regulation of the temperature of the liquid; and and a degassing apparatus which is arranged between the rough temperature regulator and the fine temperature regulator and reduces a gas dissolution concentration in the liquid. - View Dependent Claims (4, 5, 6, 8)
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2. An exposure apparatus for emitting exposure light onto a substrate via a projection optical system and a liquid so as to expose the substrate, the apparatus comprising:
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a supply pipe which supplies the liquid; a chamber which accommodates the projection optical system and the supply pipe and whose interior is air-conditioned; a temperature measuring apparatus which measures a temperature within the chamber; and a temperature regulation apparatus which is connected to the supply pipe and performs temperature regulation of the liquid supplied to the supply pipe, wherein temperature regulation of the liquid is performed by the temperature regulation apparatus based on a measurement result of the temperature measuring apparatus. - View Dependent Claims (3, 7, 9)
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Specification