PHASE ANALYSIS MEASUREMENT APPARATUS AND METHOD
First Claim
Patent Images
1. A non-contact method for inspecting an object via phase analysis, comprising:
- i) a projector projecting an optical pattern onto the surface of an object to be inspected; and
ii) obtaining at least first and second images of the surface on which the optical pattern is projected,in which the phase of the optical pattern at the surface is changed between the first and second image by moving the projector relative to the object.
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Abstract
A non-contact method and apparatus for inspecting an object via phase analysis. A projector projects an optical pattern onto the surface of an object to be inspected. At least first and second images of the surface on which the optical pattern is projected are then obtained. The phase of the optical pattern at the surface is changed between the first and second image by moving the projector relative to the object.
66 Citations
21 Claims
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1. A non-contact method for inspecting an object via phase analysis, comprising:
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i) a projector projecting an optical pattern onto the surface of an object to be inspected; and ii) obtaining at least first and second images of the surface on which the optical pattern is projected, in which the phase of the optical pattern at the surface is changed between the first and second image by moving the projector relative to the object. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 20, 21)
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17. An apparatus for inspecting an object via phase analysis, the apparatus comprising:
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a projector configured to project an optical pattern onto the surface of an object to be measured, the projector being moveable relative to the object; at least one imaging device configured to obtain a plurality of images of the object on which the optical pattern is projected; and in which the projector is configured to be moved relative to the object between obtaining the phase-shifted images to cause a change in phase of the periodic optical pattern on the object.
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18. A non-contact method for inspecting an object via phase analysis, comprising in any suitable order:
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i) a projector projecting a periodic optical pattern onto the surface of an object to be inspected; ii) at least one imaging device obtaining a plurality of phase-shifted images of the periodic optical pattern on the surface, in which the projector and imaging device are in a fixed spatial relationship relative to each other and in which the position of the periodic optical pattern on the object is moved between images by relative rotation between the projector and object about the imaging device'"'"'s perspective centre. - View Dependent Claims (19)
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Specification