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PHASE ANALYSIS MEASUREMENT APPARATUS AND METHOD

  • US 20100158322A1
  • Filed: 08/15/2008
  • Published: 06/24/2010
  • Est. Priority Date: 08/17/2007
  • Status: Active Grant
First Claim
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1. A non-contact method for inspecting an object via phase analysis, comprising:

  • i) a projector projecting an optical pattern onto the surface of an object to be inspected; and

    ii) obtaining at least first and second images of the surface on which the optical pattern is projected,in which the phase of the optical pattern at the surface is changed between the first and second image by moving the projector relative to the object.

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