MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

• US 20100159403A1
• Filed: 12/17/2009
• Published: 06/24/2010
• Est. Priority Date: 12/19/2008
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: SHIBAZAKI, Yuichi
• Granted Patent: US 8,902,402 B2
• Time in Patent Office: Days
• US Class Current: 430/325
• CPC Class Codes: G01B 11/002 for measuring two or more coordinates
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: G03F 7/7055 Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70733 Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
• CPC Class Codes: G03F 7/70775 Position control, e.g. interferometers or encoders for determining the stage position
• CPC Class Codes: G03F 7/708 Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

In an exposure station, positional information of a stage holding a wafer is measured by a first fine movement stage position measurement system including a measurement arm, and in a measurement station, positional information of a stage holding a wafer is measured by a second fine movement stage position measurement system including another measurement arm. An exposure apparatus has a third fine movement stage position measurement system which can measure positional information of a stage when the stage is carried from the measurement station to the exposure station. The third fine movement stage measurement system includes an encoder system including a plurality of Y heads and a laser interferometer system including a laser interferometer.

Claims

1. A movable body apparatus, comprising:

a movable body which is movable at least along a two-dimensional plane including a first axis and a second axis that are orthogonal to each other;

a first measurement system which measures positional information of the movable body in a direction parallel to the first axis and a direction parallel to the second axis when the movable body moves within a predetermined range within the two-dimensional plane, by irradiating at least one first measurement beam from below on a first measurement plane substantially parallel to the two-dimensional plane placed on the movable body and receiving a light from the first measurement plane of the first measurement beam;

a second measurement system which measures positional information of the movable body at least in a direction parallel to the first axis outside the predetermined range of within the two-dimensional plane; and

a control system which controls a position of the movable body, based on measurement information of at least one of the first measurement system and the second measurement system.

2. The movable body apparatus according to claim 1 wherein,

the first measurement system has a head section which irradiates at least one first measurement beam from below on the first measurement plane and receives a light from the first measurement plane of the first measurement beam, and an arm member extending in a direction parallel to the first axis.

3. The movable body apparatus according to claim 1, the apparatus further comprising:

a first support member which supports the movable body at least when the movable body moves within the predetermined range, and a second support member which supports the movable body outside the predetermined range, wherein

the first and second support members perform delivery of the movable body, reciprocally, along a direction parallel to the first axis, and

the second measurement system measures positional information when the movable body is delivered from one of the first support member to the second support member, and the second support member to the first support member.

4. The movable body apparatus according to claim 3 wherein

the first support member is provided movable along the predetermined plane, and

the movable body is supported relatively movable with respect to the first support member.

5. The movable body apparatus according to claim 1 wherein

the second measurement system includes a measurement member which irradiates at least one second measurement beam on the first measurement plane, and measures the positional information of the movable body by receiving a light from the first measurement plane of the second measurement beam.

6. The movable body apparatus according to claim 5 wherein

a grating whose periodic direction is at least in a direction parallel to the first axis is formed on the first measurement plane, whereby

the measurement member receives a diffraction light from the grating and measures positional information of the movable body in a direction parallel to the first axis.

7. The movable body apparatus according to claim 5 wherein

the measurement member is arranged in plurals at a predetermined distance, along a direction parallel to the first axis.

8. The movable body apparatus according to claim 7 wherein

some of the plurality of measurement members is placed within the predetermined range.

9. The movable body apparatus according to claim 1 wherein

the second measurement system includes a measurement member which irradiates at least one second measurement beam on a second measurement plane substantially parallel to the two-dimensional plane, and measures positional information of the movable body by receiving a light from the second measurement plane of the second measurement beam.

10. The movable body apparatus according to claim 9 wherein

a grating whose periodic direction is in a direction parallel to the first axis is formed on the second measurement plane, whereby

the second measurement system includes a head which receives a diffraction light from the grating and measures positional information of the movable body in a direction parallel to the first axis.

11. The movable body apparatus according to claim 9 wherein

the second measurement plane is provided at the movable body, and

the measurement member is arranged in plurals at a predetermined distance, along a direction parallel to the first axis.

12. The movable body apparatus according to claim 11 wherein

some of the plurality of measurement members is placed within the predetermined range.

13. The movable body apparatus according to claim 11 wherein

a distance of the plurality of measurement members is one of a distance equal to and less than half the length of the second measurement plane along a direction parallel to the first axis.

14. The movable body apparatus according to claim 1 wherein

the second measurement system measures positional information of the movable body at least in a direction parallel to the first axis, at a plurality of points distanced apart along a direction parallel to the second axis.

15. The movable body apparatus according to claim 1 wherein

the second measurement system further measures positional information of the movable body in a direction parallel to a third axis which is orthogonal to the two-dimensional plane.

16. The movable body apparatus according to claim 15 wherein

the second measurement system measures the positional information of the movable body in directions parallel to the first axis and the third axis, using the same measurement member.

17. The movable body apparatus according to claim 1 wherein

a two-dimensional grating whose periodic direction is in directions parallel to the first axis and the second axis is formed on the first measurement plane, and

the first measurement system receives a diffraction light from the two-dimensional grating and measures positional information of the movable body.

18. The movable body apparatus according to claim 1 wherein

the second measurement system includes an interferometer system which measures positional information of the movable body in at least a direction parallel to the second axis within the two-dimensional plane, by irradiating a measurement beam on a reflection surface provided on the movable body and also receiving a reflected light from the reflection surface.

19. The movable body apparatus according to claim 18 wherein

the reflection surface is placed perpendicular to the two-dimensional plane and is also tilted with respect to the first axis, and

the second measurement system irradiates the measurement beam in parallel with the first axis.

20. The movable body apparatus according to claim 19 wherein

the reflection surface includes a first and second reflection surfaces placed symmetrically with respect to the first axis, and

the second measurement system irradiates a measurement beam both on the first and second reflection surfaces.

21. The movable body apparatus according to claim 1 wherein

when the control system switches from one of the first measurement system and the second measurement system to the other, measurement values of the other system is reset based on measurement values of the one system.

22. An exposure apparatus that forms a pattern on an object by an irradiation of an energy beam, the apparatus comprising:

the movable body apparatus according to claim 1 in which the object is mounted on the movable body; and

a patterning device which irradiates the energy beam on the object mounted on the movable body.

23. The exposure apparatus according to claim 22 wherein

a measurement center of the first measurement system which is the center of an irradiation point of the first measurement beam, coincides with an exposure position which is a center of an irradiation area of the energy beam irradiated on the object.

24. A device manufacturing method, the method including:

exposing an object using the exposure apparatus according to claim 22; and

developing the object which has been exposed.

25. A movable body apparatus, comprising:

a first support member which moves within a first range in a two dimensional plane including a first axis and a second axis that are orthogonal to each other;

a second support member which moves within a second range positioned on one side of a direction parallel to the first axis of the first range in the two-dimensional plane;

a holding member which is placed in the vicinity of a border of the first range and the second range;

a movable body which is supported relatively movable at least within a plane parallel to the two-dimensional plane, by the first support member and the second support member;

a first measurement system which measures positional information of the movable body in a direction parallel to the first axis and a direction parallel to the second axis, by irradiating at least one first measurement beam from below on a first measurement plane substantially parallel to the two-dimensional plane placed on the movable body supported by the first support member and receiving a light from the first measurement plane of the first measurement beam; and

a second measurement system which measures positional information of the movable body on the holding member when the movable body is delivered between the first support member and the second support member via the holding member.

26. The movable body apparatus according to claim 25 wherein

the second measurement system includes an interferometer system which measures positional information of the movable body in at least a direction parallel to the second axis within the two-dimensional plane, by irradiating a measurement beam on a reflection surface provided on the movable body and also receiving a reflected light from the reflection surface.

27. The movable body apparatus according to claim 26 wherein

the reflection surface is placed perpendicular to the two-dimensional plane and also tilted with respect to the first axis, and

the second measurement system irradiates the measurement beam in parallel with the first axis.

28. The movable body apparatus according to claim 27 wherein

the reflection surface includes a first and second reflection surfaces placed symmetrically with respect to the first axis, and

the second measurement system irradiates a measurement beam on each of the first and second reflection surfaces.

29. The movable body apparatus according to claim 25 wherein

the second measurement system measures positional information of the movable body in the two-dimensional plane including a first position in a direction perpendicular to the two-dimensional plane, and

the apparatus further comprises a third measurement system which measures positional information of the movable body moving between the first support member and the second support member via the holding member, within the plane where the Movable body is relatively supported by the first support member and the second support member, including a second position in the direction perpendicular to the two-dimensional plane.

30. An exposure apparatus that forms a pattern on an object by an irradiation of an energy beam, the apparatus comprising:

the movable body apparatus according to claim 25 in which the object is mounted on the movable body; and

a patterning device which irradiates the energy beam on the object mounted on the movable body.

31. The exposure apparatus according to claim 30 wherein

a measurement center of the first measurement system which is the center of an irradiation point of the first measurement beam, coincides with an exposure position which is a center of an irradiation area of the energy beam irradiated on the object.

32. A device manufacturing method, the method including:

exposing an object using the exposure apparatus according to claim 30; and

developing the object which has been exposed.

33. An exposure apparatus that exposes an object with an energy beam, the apparatus comprising:

a first support member which is movable within a first range including an exposure station where exposure of the object by the energy beam is performed;

a second support member which is movable within a second range including a measurement station where measurement of alignment information of the object is performed;

a movable body which holds the object, and is movably supported by each of the first and second support members;

a first measurement system which measures positional information of the movable body supported by the first support member;

a second measurement system which measures positional information of the movable body supported by the second support member; and

a third measurement system which measures positional information of the movable body when the movable body is delivered from one of the first and second support members to the other.

34. The exposure apparatus according to claim 33 wherein

the first measurement system has at least a part of the system provided in a measurement member placed below the movable body supported by the first support member, and measures positional information of the movable body by irradiating a measurement beam oz the measurement plane of the movable body.

35. The exposure apparatus according to claim 34 wherein

in a predetermined plane where the object is moved, an irradiation position of the measurement beam of the first measurement system is set within an irradiation area of the energy beam.

36. The exposure apparatus according to claim 34 wherein

the measurement member is provided in a support member of an optical system which emits the energy beam.

37. The exposure apparatus according to claim 33 wherein

the third measurement system measures positional information from at least one of an upper side and a side with respect to the movable body.

38. The exposure apparatus according to claim 33 wherein

the second measurement system has at least apart of the system provided in a measurement member placed below the movable body supported by the second movable body, and measures positional information of the movable body by irradiating a measurement beam on a measurement plane of the movable body.

39. The exposure apparatus according to claim 38, the apparatus further comprising:

a detection system which detects the alignment information, wherein

in the predetermined plane, an irradiation position of the measurement beam of the second measurement system is set within a detection area of the detection system.

40. The exposure apparatus according to claim 39 wherein

the measurement member is provided in a support member of the detection system.

41. The exposure apparatus according to claim 33 wherein

the first measurement system in at least one of the first and second measurement systems includes an encoder system, and the movable body has a grating formed on the measurement plane.

42. The exposure apparatus according to claim 33, the apparatus further comprising:

a movable holding member which supports the movable body when delivering the movable body from one of the first and second support members to the other.

43. The exposure apparatus according to claim 42, the apparatus further comprising:

a controller which moves the movable body supported by one of the first and second support members to the holding member, and also makes the first and second support members be in proximity so as to move the movable body supported by the other of the first and second support members to the one support member.

44. An exposure method in which an object is exposed with an energy beam, the method comprising:

moving a first support member supporting a movable body holding the object within a first range including an exposure station where exposure of the object by the energy beam is performed, and measuring positional information of the movable body supported by the first support member using a first measurement system;

moving a second support member supporting a movable body holding the object within a second range including a measurement station where measurement of alignment information of the object is performed, and measuring positional information of the movable body supported by the second support member using a second measurement system; and

measuring positional information of the movable body using a third measurement system when the movable body is delivered from one of the first and second support members to the other.

45. The exposure method according to claim 44 wherein

positional information of the movable body is measured by irradiating a measurement beam on the measurement plane of the movable body from the first measurement system which has at least a part of the system provided in a measurement member placed below the movable body supported by the first support member.

46. The exposure method according to claim 45 wherein

in a predetermined plane where the object is moved, an irradiation position of the measurement beam of the first measurement system is set within an irradiation area of the energy beam.

47. The exposure method according to claim 45 wherein

the measurement member is provided in a support member of an optical system which emits the energy beam.

48. The exposure method according to claim 44 wherein

the third measurement system measures positional information from at least one of an upper side and a side with respect to the movable body.

49. The exposure method according to claim 44 wherein

positional information of the movable body is measured by irradiating a measurement beam on the measurement plane of the movable body from the second measurement system which has at least a part of the system provided in a measurement member placed below the movable body supported by the second support member.

50. The exposure method according to claim 49 wherein

in the predetermined plane, an irradiation position of the measurement beam of the second measurement system is set within a detection area of the detection system which detects the alignment information.

51. The exposure method according to claim 50 wherein

the measurement member is provided in a support member of the detection system.

52. The exposure method according to claim 44 wherein

the first measurement system in at least one of the first and second measurement systems includes an encoder system, and the movable body has a grating formed on the measurement plane.

53. The exposure method according to claim 44 wherein

the movable body is supported by a movable holding member when the movable body is delivered from one of the first and second support members to the other.

54. The exposure method according to claim 53 wherein

the movable body supported by one of the first and second support members is moved to the holding member, and the first and second support members are also made to be in proximity so that the movable body supported by the other of the first and second support members is moved to the one support member.

55. A device manufacturing method, including

exposing an object using the exposure method according to claim 44;

and

developing the object which has been exposed.