THERMAL MASS FLOW METER
First Claim
1. A thermal mass flow meter comprising:
- a heat generating element of a chip type for heating a fluid inside piping, the heat generating element being secured onto a surface of a periphery of the piping through which the fluid is flowing;
paired temperature sensors of a chip type formed as members separated from the heat generating element, the paired temperature sensors being secured to positions on the upstream side and the downstream side of the heat generating element on the surface of the piping, with an equal distance apart therefrom, along the flowing direction of the fluid inside the piping; and
an operation unit for finding the flow rate of the fluid flowing through the piping from the temperature difference of the paired temperature sensors.
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Accused Products
Abstract
A heater chip (4) as a heat generation element is secured to the surface on the periphery of piping (2). Further, a temperature sensor chip couple (6) is placed on the surface on the periphery of the piping (2), along the direction of flow of fluid flowing in the piping (2). One (6a) of the sensor chips in the couple is placed on the upstream side of the heater chip (4) and the other (6b) is placed on the downstream side of the heater chip (4). The heater chip (4) and the temperature sensor chips (6a, 6b) are formed in a chip type. The temperature sensor chips (6a, 6b) as the pair are placed at positions spaced by the same distance from the heater chip (4).
29 Citations
9 Claims
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1. A thermal mass flow meter comprising:
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a heat generating element of a chip type for heating a fluid inside piping, the heat generating element being secured onto a surface of a periphery of the piping through which the fluid is flowing; paired temperature sensors of a chip type formed as members separated from the heat generating element, the paired temperature sensors being secured to positions on the upstream side and the downstream side of the heat generating element on the surface of the piping, with an equal distance apart therefrom, along the flowing direction of the fluid inside the piping; and an operation unit for finding the flow rate of the fluid flowing through the piping from the temperature difference of the paired temperature sensors. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification