Electron microscope device
First Claim
1. An electron microscope device, comprising a scanning electron microscope provided with scanning means for scanning an electron beam and an electron detector for detecting an electron issued from a specimen where the electron beam is projected for scanning, wherein a scanning electron image is acquired based on a detection result from said electron detector,wherein said electron detector comprises a fluorescent substance layer for performing photoelectric conversion, a wavelength filter giving restriction so that all or almost all of wavelength ranges of fluorescent lights from said fluorescent substance layer can be transmitted, and a wavelength detecting element for receiving said fluorescent light transmitted through said wavelength filter and for performing photoelectric conversion.
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Abstract
The present invention provides an electron microscope device, comprising a scanning electron microscope 2 provided with scanning means 10 for scanning an electron beam and an electron detector 12 for detecting an electron 11 issued from a specimen 8 where the electron beam is projected for scanning, wherein a scanning electron image is acquired based on a detection result from the electron detector, wherein the electron detector comprises a fluorescent substance layer for performing photoelectric conversion, a wavelength filter giving restriction so that all or almost all of wavelength ranges of fluorescent lights from the fluorescent substance layer can be transmitted, and a wavelength detecting element for receiving the fluorescent light transmitted through the wavelength filter and for performing photoelectric conversion.
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Citations
7 Claims
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1. An electron microscope device, comprising a scanning electron microscope provided with scanning means for scanning an electron beam and an electron detector for detecting an electron issued from a specimen where the electron beam is projected for scanning, wherein a scanning electron image is acquired based on a detection result from said electron detector,
wherein said electron detector comprises a fluorescent substance layer for performing photoelectric conversion, a wavelength filter giving restriction so that all or almost all of wavelength ranges of fluorescent lights from said fluorescent substance layer can be transmitted, and a wavelength detecting element for receiving said fluorescent light transmitted through said wavelength filter and for performing photoelectric conversion.
Specification