SEMICONDUCTOR DEVICE TEST SYSTEM

• US 20100164529A1
• Filed: 08/12/2009
• Published: 07/01/2010
• Est. Priority Date: 12/31/2008
• Status: Abandoned Application

• Current Assignee: Princeton Technology Corporation
• Original Assignee: Princeton Technology Corporation
• Inventors: HUNG, Tsan-Fu
• Application Number:
  US12/540,099
• Publication Number:
  US 20100164529A1
• Time in Patent Office: Days
• US Class Current: 324/762.90
• CPC Class Codes: A61P 1/00 Drugs for disorders of the alimentary tract or the digestive system
• CPC Class Codes: A61P 3/04 Anorexiants; Antiobesity agents
• CPC Class Codes: A61P 9/10 for treating ischaemic or atherosclerotic diseases, e.g. antianginal drugs, coronary vasodilators, drugs for myocardial infarction, retinopathy, cerebrovascula insufficiency, renal arteriosclerosis
• CPC Class Codes: G01R 15/22 using light-emitting devices, e.g. LED, optocouplers G01R31/31901 takes precedence
• CPC Class Codes: G01R 31/2889 Interfaces, e.g. between probe and tester G01R31/31905 and G01R1/07364 take precedence

Abstract

A test system for semiconductor devices including a tester, a test station, a first controller, and one or more second controllers, is disclosed. The tester handles operations of the test system. The test station, coupled to the tester, receives test information from the tester via a transmission path, where the test station performs a test process to a semiconductor device under test according to the test information, and then provides a test result to the tester. The first controller, electronically connected to the test station, receives the test information. The second controllers, electronically connected to the test station, handles the test process of the test station, where each the second controller corresponds to one or more semiconductor device under test. The first controller broadcasts the test information to one or more second controllers and receives the test result from the second controllers through an infrared communication interface.

Claims

1. A test system for semiconductor devices, comprising:

a tester for handling operations of said test system;

a test station coupled to said tester for receiving test information from said tester via a transmission path, wherein said test station performs a test process to a semiconductor device under test according to said test information, and then provides a test result to said tester;

a first controller electronically connected to said test station for receiving said test information; and

one or more second controllers electronically connected to said test station for handling said test process of said test station, wherein each said second controller corresponds to one or more said semiconductor device under test,

wherein said first controller broadcasts said test information to one or more second controllers and receives said test result from said second controllers through an infrared communication interface.

2. The test system for semiconductor devices as claimed in claim 1, wherein said tester includes a portable device or a mobile terminal.

3. The test system for semiconductor devices as claimed in claim 1, wherein said test process includes an electrical test or a wafer probe.

4. The test system for semiconductor devices as claimed in claim 1, wherein said semiconductor device includes a semiconductor wafer having dice thereon.

5. The test system for semiconductor devices as claimed in claim 1, wherein said transmission path includes an infrared transmission path.

6. The test system for semiconductor devices as claimed in claim 1, wherein said test station includes a probe card for testing said semiconductor device.

7. The test system for semiconductor devices as claimed in claim 1, wherein said first controller comprises:

a first control unit for controlling operations of said first controller;

a first infrared transmission unit coupled to said first control unit for transmitting said test information to one or more said second controllers or receiving said test result from one or more said second controllers through said infrared communication interface;

a first memory unit coupled to said first control unit for storing data or software required by said first control unit; and

a first input/output unit coupled to said first control unit for providing a physical input/output interface between said first controller and said test station.

8. The test system for semiconductor devices as claimed in claim 1, wherein said second controller comprises:

a second control unit for controlling operations of said second controller;

a second infrared transmission unit coupled to said second control unit for transmitting said test result to said first controller or receiving said test information from said first controller through said infrared communication interface;

a second memory unit coupled to said second control unit for storing data or software required by said second control unit; and

a second input/output unit coupled to said second control unit for providing a physical input/output interface between said second controller and said semiconductor device.

9. The test system for semiconductor devices as claimed in claim 1, wherein said tester comprises:

a third control unit for controlling operations of said tester;

a third infrared transmission unit coupled to said third control unit for transmitting said test information to said test station or receiving said test result from said test station through said infrared communication interface;

a wireless communication unit coupled to said third control unit for providing a communication interface between said tester and an external base station;

a third memory unit coupled to said third control unit for storing data or software required by said third control unit;

an input unit coupled to said third control unit for providing an input interface for said tester;

an alarm unit coupled to said third control unit for sending a notification message at a predetermined state; and

a display unit coupled to said third control unit for showing said test result.

10. The test system for semiconductor devices as claimed in claim 9, wherein said input unit includes a keyboard, a touch screen or a voice control device.

11. The test system for semiconductor devices as claimed in claim 9, wherein said alarm unit includes a speaker, a buzzer or a micromotor.

12. The test system for semiconductor devices as claimed in claim 9, wherein said notification message includes text, audio or vibrating signals.

13. The test system for semiconductor devices as claimed in claim 9, wherein said tester acquires test schedule information through predetermining said test schedule information by said input unit, accessing said test schedule information stored in said third memory unit or downloading said test schedule information from said external base station.

14. The test system for semiconductor devices as claimed in claim 9, wherein said alarm unit sends said notification message based on said test schedule information stored in said third memory unit.

15. The test system for semiconductor devices as claimed in claim 9, wherein said tester identifies said test station through said third infrared transmission unit based on said test schedule information and user authority stored in said third memory unit.

16. A test system for semiconductor devices, comprising:

a tester for handling operations of said test system; and

a test station coupled to said tester for receiving test information from said tester through an infrared communication interface to perform a test process to a semiconductor device under test according to said test information, and then provides a test result to said tester, wherein said tester includes;

(a) a third control unit for handling operations of said tester;

(b) a third infrared transmission unit coupled to said third control unit for transmitting said test information to said test station or receiving said test result from said test station through said infrared communication interface;

(c) a wireless communication unit coupled to said third control unit for providing a communication interface between said tester and an external base station;

(d) a third memory unit coupled to said third control unit for storing data or software required by said third control unit;

(e) an input unit coupled to said third control unit for providing an input interface for said tester;

(f) an alarm unit coupled to said third control unit for sending a notification message at a predetermined state; and

(g) a display unit coupled to said third control unit for showing said test result.

17. The test system for semiconductor devices as claimed in claim 16, further comprising:

a first controller electronically connected to said test station for receiving said test information; and

one or more second controllers electronically connected to said test station for handling said test process of said test station, wherein each said second controllers corresponds to one or more said semiconductor devices under test.

18. The test system for semiconductor devices as claimed in claim 17, wherein said first controller broadcasts said test information to one or more second controllers and receives said test result from said second controllers through said infrared communication interface.

19. The test system for semiconductor devices as claimed in claim 16, wherein said tester acquires test schedule information through predetermining said test schedule information by said input unit, accessing said test schedule information stored in said third memory unit or downloading said test schedule information from said external base station.

20. The test system for semiconductor devices as claimed in claim 16, wherein said alarm unit sends said notification message based on said test schedule information stored in said third memory unit.

21. The test system for semiconductor devices as claimed in claim 16, wherein said tester identifies said test station through said third infrared transmission unit based on said test schedule information and user authority stored in said third memory unit.

22. The test system for semiconductor devices as claimed in claim 16, wherein said tester includes a portable device or a mobile terminal.

23. The test system for semiconductor devices as claimed in claim 16, wherein the test process includes an electrical test or a wafer probe.

24. The test system for semiconductor devices as claimed in claim 16, wherein the semiconductor device includes a semiconductor wafer having dice thereon.

25. The test system for semiconductor devices as claimed in claim 16, wherein the test station includes a probe card for testing said semiconductor device.

26. The test system for semiconductor devices as claimed in claim 17, wherein said first controller comprises:

a first control unit for controlling operations of said first controller;

a first infrared transmission unit coupled to said first control unit for transmitting said test information to one or more said second controllers or receiving said test result from one or more said second controllers through said infrared communication interface;

a first memory unit coupled to said first control unit for storing data or software required by said first control unit; and

a first input/output unit coupled to said first control unit for providing a physical input/output interface between said first controller and said test station.

27. The test system for semiconductor devices as claimed in claim 17, wherein said second controller comprises:

a second control unit for controlling operations of said second controller;

a second infrared transmission unit coupled to said second control unit for transmitting said test result to said first controller or receiving said test information from said first controller through said infrared communication interface;

a second memory unit coupled to said second control unit for storing data or software required by said second control unit; and

a second input/output unit coupled to said second control unit for providing a physical input/output interface between said second controller and said semiconductor device.