Resist underlayer composition and method of manufacturing semiconductor integrated circuit device using the same
First Claim
Patent Images
1. A resist underlayer composition, comprising:
- a solvent; and
an organosilane polymer, the organosilane polymer being a condensation polymerization product of at least one first compound represented by Chemical Formulae 1 and 2 and at least one second compound represented by Chemical Formulae 3 to 5;
[R1]3Si-[Ph1]1-Si[R2]3
[Chemical Formula 1]
[R1]3Si-[Ph1]m-Ph2
[Chemical Formula 2]
[R1]3Si—
(CH2)n—
R3
[Chemical Formula 3]
[R1]3Si—
R4
[Chemical Formula 4]
[R1]3Si—
X—
Si[R2]3
[Chemical Formula 5]wherein, in Chemical Formulae 1 to 5;
Ph1 is a substituted or unsubstituted phenylene group,Ph2 is a substituted or unsubstituted phenyl group,R1 and R2 are each independently a halogen, a hydroxyl group, an alkoxy group, a carboxyl group, an ester group, a cyano group, a haloalkylsulfite group, an alkylamine group, an alkylsilylamine group, or an alkylsilyloxy group,R3 is a substituted or unsubstituted C6 to C12 aryl group,R4 is hydrogen or a C1 to C6 alkyl group,X is a substituted or unsubstituted linear alkylene group, a substituted or unsubstituted branched alkylene group, or an alkylene group including an alkenylene group, an alkynylene group, a heterocyclic group, an urea group, or an isocyanurate group in its main chain,l and m are each independently integers of 1 to 4, andn is an integer of 0 to 5.
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Abstract
A resist underlayer composition and a method of manufacturing a semiconductor integrated circuit device, the composition including a solvent and an organosilane polymer, the organosilane polymer being a condensation polymerization product of at least one first compound represented by Chemical Formulae 1 and 2 and at least one second compound represented by Chemical Formulae 3 to 5.
18 Citations
13 Claims
-
1. A resist underlayer composition, comprising:
-
a solvent; and an organosilane polymer, the organosilane polymer being a condensation polymerization product of at least one first compound represented by Chemical Formulae 1 and 2 and at least one second compound represented by Chemical Formulae 3 to 5;
[R1]3Si-[Ph1]1-Si[R2]3
[Chemical Formula 1]
[R1]3Si-[Ph1]m-Ph2
[Chemical Formula 2]
[R1]3Si—
(CH2)n—
R3
[Chemical Formula 3]
[R1]3Si—
R4
[Chemical Formula 4]
[R1]3Si—
X—
Si[R2]3
[Chemical Formula 5]wherein, in Chemical Formulae 1 to 5; Ph1 is a substituted or unsubstituted phenylene group, Ph2 is a substituted or unsubstituted phenyl group, R1 and R2 are each independently a halogen, a hydroxyl group, an alkoxy group, a carboxyl group, an ester group, a cyano group, a haloalkylsulfite group, an alkylamine group, an alkylsilylamine group, or an alkylsilyloxy group, R3 is a substituted or unsubstituted C6 to C12 aryl group, R4 is hydrogen or a C1 to C6 alkyl group, X is a substituted or unsubstituted linear alkylene group, a substituted or unsubstituted branched alkylene group, or an alkylene group including an alkenylene group, an alkynylene group, a heterocyclic group, an urea group, or an isocyanurate group in its main chain, l and m are each independently integers of 1 to 4, and n is an integer of 0 to 5. - View Dependent Claims (2, 3, 4, 5, 6, 7, 11, 12, 13)
-
-
8. A resist underlayer composition, comprising:
-
a solvent; and an organosilane polymer, the organosilane polymer including a repeating unit represented by Chemical Formula 6;
(SiO1.5-[Ph1]1-SiO1.5)a(Ph2-[Ph1]m-SiO1.5)b(R3—
CH2n—
SiO1.5)c(R4—
SiO1.5)d(SiO1.5—
X—
SiO1.5)e
[Chemical Formula 6]wherein, in Chemical Formula 6; Ph1 is a substituted or unsubstituted phenylene group, Ph2 is a substituted or unsubstituted phenyl group, R3 is a substituted or unsubstituted C6 to C12 aryl group, R4 is hydrogen or a C1 to C6 alkyl group, X is a substituted or unsubstituted linear alkylene group, a substituted or unsubstituted branched alkylene group, or an alkylene group including an alkenylene group, an alkynylene group, a heterocyclic group, an urea group, or an isocyanurate group in its main chain, l and m are each independently integers of 1 to 4, n is an integer of 0 to 5, and a, b, c, d, and e satisfy the relations;
0≦
a≦
0.99, 0≦
b≦
0.99, 0.01≦
a+b≦
0.99, 0≦
c≦
0.99, 0≦
d≦
0.99, 0≦
e≦
0.99, 0.01≦
c+d+e≦
0.99, and a+b+c+d+e=1.
-
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9. A resist underlayer, comprising:
-
an organosilane polymer including a repeating unit represented by Chemical Formula 6;
(SiO1.5-[Ph1]1-SiO1.5)a(Ph2-[Ph1]m-SiO1.5)b(R3—
CH2n—
SiO1.5)c(R4—
SiO1.5)d(SiO1.5—
X—
SiO1.5)e
[Chemical Formula 6]wherein, in Chemical Formula 6; Ph1 is a substituted or unsubstituted phenylene group, Ph2 is a substituted or unsubstituted phenyl group, R3 is a substituted or unsubstituted C6 to C12 aryl group, R4 is hydrogen or a C1 to C6 alkyl group, X is a substituted or unsubstituted linear alkylene group, a substituted or unsubstituted branched alkylene group, or an alkylene group including an alkenylene group, an alkynylene group, a heterocyclic group, an urea group, or an isocyanurate group in its main chain, l and m are each independently integers of 1 to 4, n is an integer of 0 to 5, and a, b, c, d, and e satisfy the relations;
0≦
a≦
0.99, 0≦
b≦
0.99, 0.01≦
a+b≦
0.99, 0≦
c≦
0.99, 0≦
d≦
0.99, 0≦
e≦
0.99, 0.01≦
c+d+e≦
0.99, and a+b+c+d+e=1. - View Dependent Claims (10)
-
Specification