Metal Complex Compositions and Methods for Making Metal-Containing Films
First Claim
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1. A composition of matter comprising a metal complex having the formula:
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(MLx)zDy
(F1)wherein each M, independent of other M, is a metal atom selected from the group consisting of;
Be, Mg, Ca, Sr, Ba, Ra, Al, Ga, In, Sc, Y, La, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Mn, Re, Fe, Ru, Os, Co, Rh, Ir, Ni, Pd, Pt, Cu, Ag, Au, Zn, Hg, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Ac, Th, Pa, U, Np, Pu, Am, and Cm;
wherein each D, independent of other D, is a neutral coordinating ligand;
wherein x is the oxidation state of M;
wherein y is 0, 1, 2, 3 or 4;
wherein z is equal to 1, 2 or 3;
wherein each L, independent of other L, is an anionic ligand, wherein at least one of L is a monoanionic group comprising a diboranamide or diboranaphosphide group having the formula;
wherein;
each X is independently N or P;
wherein, independently for each L, R1 and R2 are functional groups independently selected from the group consisting of hydrogen, alkyl, haloalkyl, aryl, heteroaryl, trialkylsilyl, alkenyl, alkynyl, halogen, fluoroalkyl, silylalkyl, alkoxy, hydroxyl, amide, boryl, and thiolate.
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Abstract
The present invention provides compositions of matter useful as deposition agents for making structures, including thin film structures and hard coatings, on substrates and features of substrates. In an embodiment, for example, the present invention provides metal complexes having one or more diboranamide or diboranaphosphide ligands that are useful as chemical vapor deposition (CVD) and/or atomic layer deposition (ALD) precusors for making thin film structures and coatings. Metal complex CVD precursors are provided that possess volitilities sufficiently high so as to provide dense, smooth and homogenous thin films and coatings.
353 Citations
29 Claims
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1. A composition of matter comprising a metal complex having the formula:
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(MLx)zDy
(F1)wherein each M, independent of other M, is a metal atom selected from the group consisting of;
Be, Mg, Ca, Sr, Ba, Ra, Al, Ga, In, Sc, Y, La, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Mn, Re, Fe, Ru, Os, Co, Rh, Ir, Ni, Pd, Pt, Cu, Ag, Au, Zn, Hg, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Ac, Th, Pa, U, Np, Pu, Am, and Cm;wherein each D, independent of other D, is a neutral coordinating ligand; wherein x is the oxidation state of M; wherein y is 0, 1, 2, 3 or 4; wherein z is equal to 1, 2 or 3; wherein each L, independent of other L, is an anionic ligand, wherein at least one of L is a monoanionic group comprising a diboranamide or diboranaphosphide group having the formula; wherein;
each X is independently N or P;wherein, independently for each L, R1 and R2 are functional groups independently selected from the group consisting of hydrogen, alkyl, haloalkyl, aryl, heteroaryl, trialkylsilyl, alkenyl, alkynyl, halogen, fluoroalkyl, silylalkyl, alkoxy, hydroxyl, amide, boryl, and thiolate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
wherein m is an integer from 1 to 7.
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3. The composition of claim 1 wherein x is 1 and z is 1.
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4. The composition of claim 3 wherein ML has a formula selected from the group consisting of:
- M((BH3)2NR1R2) and M((BH3)2PR1R2).
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5. The composition of claim 3 wherein ML has a formula selected from the group consisting of:
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6. The composition of claim 5 having a formula selected from the group consisting of:
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7. The composition of claim 1 wherein x is 2 and z is 1.
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8. The composition of claim 7 wherein ML2 has a formula selected from the group consisting of:
- M((BH3)2NR1R2)2 and M((BH3)2PR1R2)2.
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9. The composition of claim 7 wherein ML2 has a formula selected from the group consisting of:
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10. The composition of claim 9 having a formula selected from the group consisting of:
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11. The composition of claim 1 wherein x is 3 and z is 1 or 2.
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12. The composition of claim 11 wherein (MLX)z has a formula selected from the group consisting of:
- M((BH3)2NR1R2)3, M((BH3)2PR1R2)3, (M((BH3)2NR1R2)3)2 and (M((BH3)2PR1R2)3)2.
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13. The composition of claim 11 wherein (MLx)z has a formula selected from the group consisting of:
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14. The composition of claim 11 having a formula selected from the group consisting of:
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15. The composition of claim 1 wherein M is selected from the group consisting of Cu, Ag, Au, Hg, and TI.
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16. The composition of claim 1 wherein M is selected from the group consisting of Be, Mg, Ca, Sr, Ra, Ti, V, Nb, Cr, Mo, Mn, Re, Fe, Eu, Yb, Sr, Ru, Os, Co, Rh, Ir, Ni, Pd, Pt, and W.
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17. The composition of claim 1 wherein M is selected from the group consisting of Mg, Ti, V, Cr, Mo, and Mn.
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18. The composition of claim 1 wherein M is selected from the group consisting of Al, Ga, In, Sc, Y, La, Ti, V, Nb, Cr, Mo, W, Mn, Fe, Os, Co, Rh, Ru, Ir, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Ac, U, Np, Pu, Cland U.
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19. The composition of claim 1 wherein R1 and R2 are C1 to C10 alkyl groups.
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20. The composition of claim 1 wherein R1 and R2 are methyl groups.
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21. The composition of claim 1 wherein at least one L is a diboranamide or diboranaphosphide group, and at least one L is a anionic ligand different than a diboranamide group or diboranaphosphide group.
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22. The composition of claim 1 wherein at least one L is a diboranamide or diboranaphosphide group, and at least one L is an anionic ligand selected from the group consisting of:
- a cyclopentadienyl, a borohydride, β
-diketonate, octahydroborato group, indenyl, β
-diketiminate, pyrazolate, triazolate, amidinate, alkyl, alkoxide, thiolate, amide, imide, halide, hydride, sulfide, cyanide, thiocyanate, isothiocyanate, hydroxide, oxide, oxalate, nitrides, nitrite, nitrate, azide, phosphate, phosphite, and cyclooctatetraene dianion.
- a cyclopentadienyl, a borohydride, β
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23. The composition of claim 1 wherein at least one L is a diboranamide or diboranaphosphide group, and at least one L is an anionic ligand selected from the group consisting of:
- cyclopentadienyl, monomethylcyclopentadienyl, 1,2-dimethylcyclopentadienyl, 1,3-dimethylcyclopentadienyl, 1,2,3-trimethylcyclopentadienyl, 1,2,4-trimethylcyclopentadienyl, tetramethylcyclopentadienyl, pentamethylcyclopentadienyl, (trimethylsilyl)cyclopentadienyl, 1,3 bis(trimethylsilyl)cyclopentadienyl, 1,2,4-tris(trimethylsilyl)cyclopentadienyl, trifluoromethylcyclopentadienyl, tetrahydroborate, trihydrocyanoborate, trihydromethylborate;
acetylacetonate (2,4-pentanedione anion), 1,1,1-(trifluoro)acetylacetonate (1,1,1-trifluoro-2,4-pentanedione anion), hexafluoroacetylacetonate (1,1,1,5,5,5-hexafluoro-2,4-pentanedione anion), 1,1,1-trifluoro-5,5-dimethyl-2,4-hexanedione anion, 2,2,4,4-tetramethyl-3,5-heptanedione anion, and octahydroborato (B3H8−
).
- cyclopentadienyl, monomethylcyclopentadienyl, 1,2-dimethylcyclopentadienyl, 1,3-dimethylcyclopentadienyl, 1,2,3-trimethylcyclopentadienyl, 1,2,4-trimethylcyclopentadienyl, tetramethylcyclopentadienyl, pentamethylcyclopentadienyl, (trimethylsilyl)cyclopentadienyl, 1,3 bis(trimethylsilyl)cyclopentadienyl, 1,2,4-tris(trimethylsilyl)cyclopentadienyl, trifluoromethylcyclopentadienyl, tetrahydroborate, trihydrocyanoborate, trihydromethylborate;
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24. The composition of claim 1 wherein D is a two-electron donor ligand.
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25. The composition of claim 1 wherein D is selected from the group consisting of:
- alkenes (R3R4C═
CR5R6), alkynes (R3C≡
CR4), ethers (R3OR4), sulfides (R3SR4), amines (R3NR4R5), nitriles (R3CN), isonitriles (R3NC), phosphines (R3PR4R5), phosphites ((R30)P(OR4)(OR5)), arsines (R3AsR4R5), and stibenes (R3SbR4R5);
wherein R3, R4, R5 and R6 are functional groups independently selected from the group consisting of hydrogen, alkyl, fluoroalkyl, aryl, alkenyl, alkynyl, and trialkylsilyl.
- alkenes (R3R4C═
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26. The composition of claim 1 wherein D is selected from the group consisting of:
- cyclic monoethers, linear polyethers, cyclic polyethers, cyclic monoamines, linear polyamines, cyclic polyamines, cyclic monophosphines, linear polyphosphines, cyclic polyphosphines, cyclic monoalkenes, linear polyenes, linear dienes, linear trienes, linear tetraenes, cyclic polyenes, cyclic dienes, cyclic trienes, cyclic tetraenes, cyclic monoalkynes, cyclic dialkynes, carbonyl, and trifluorophosphine.
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27. The composition of claim 1 wherein D is selected from the group consisting of tetrahydrofuran, 1,2-dimethoxyethane, diethylether, and dimethyl ether.
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28. The composition of claim 1 having a formula selected from the group consisting of:
- Mg(H3BNMe2BH3)2;
Mg(H3BNMe2BH3)2(tetrahydrofuran);
Mg(H3BNMe2BH3)2(dimethoxyethane);
Ti(H3BNMe2BH3)2;
Cr(H3BNMe2BH3)2;
Mo(H3BNMe2BH3)2;
Mn(H3BNMe2BH3)2;
Y2(H3BNMe2BH3)6;
Y(H3BNMe2BH3)3(tetrahydrofuran);
La2(H3BNMe2BH3)6;
La(H3BNMe2BH3)3(tetrahydrofuran);
Ce2(H3BNMe2BH3)6;
Ce(H3BNMe2BH3)3(tetrahydrofuran);
Pr(H3BNMe2BH3)3(tetrahydrofuran);
Nd(H3BNMe2BH3)3(tetrahydrofuran);
Sm(H3BNMe2BH3)3(tetrahydrofuran);
Eu(H3BNMe2BH3)3(tetrahydrofuran);
Eu2(H3BNMe2BH3)4(tetrahydrofuran)4;
Dy2(H3BNMe2BH3)6;
Dy(H3BNMe2BH3)3(tetrahydrofuran);
Er2(H3BNMe2BH3)6;
Er(H3BNMe2BH3)3(tetrahydrofuran);
Th(H3BNMe2BH3)4;
U(H3BNMe2BH3)3;
U(H3BNMe2BH3)3(tetrahydrofuran); and
U(H3BNMe2BH3)3(PMe3)2.
- Mg(H3BNMe2BH3)2;
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29-65. -65. (canceled)
Specification
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Current AssigneeBoard of Trustees of The University of Illinois
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Original AssigneeBoard of Trustees of The University of Illinois
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InventorsKim, Do Young, Yang, Yu, Daly, Scott, Girolami, Gregory S., Kumar, Navneet, Abelson, John R.
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Granted Patent
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Time in Patent OfficeDays
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Field of Search
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US Class Current534/15
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CPC Class CodesC07F 19/005 without metal-C linkagesC07F 5/022 without C-boron linkagesC23C 16/40 OxidesH01B 1/06 mainly consisting of other ...H01B 1/12 organic substances organic ...
