Support structure and exposure apparatus

• US 20100171022A1
• Filed: 07/24/2009
• Published: 07/08/2010
• Est. Priority Date: 01/26/2007
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Sakamoto, Hideaki, Fujimaki, Norihiko, Kamiyama, Takahide
• Application Number:
  US12/458,865
• Publication Number:
  US 20100171022A1
• Time in Patent Office: Days
• US Class Current: 248/559
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation
• CPC Class Codes: G10K 11/172 using resonance effects

Abstract

A support structure supports support objects. The support structure comprises a resonance apparatus that resonates with air vibrations transmitted from the exterior to damp the air vibrations.

Claims

1. A support structure that supports a support object, comprising:

a resonance apparatus that resonates with air vibrations transmitted from an exterior to damp the air vibrations.

2. A support structure according to claim 1, wherein the resonance apparatus damps the air vibrations by means of Helmholtz resonance.

3. A support structure according to claim 1, wherein

the resonance apparatus comprises a recessed part formed on the support structure,

a lid part that covers a part of or an entirety of the recessed part, and

a neck part that has a narrow path that connects the space covered by the lid part with an external space.

4. A support structure according to claim 3, wherein

the support structure includes a cast metal member, and at least a part of or an entirety of the wall surface of the recessed part is formed by the cast metal member.

5. A support structure according to claim 4, wherein at least one of the space and the narrow path is formed using specifications according to the frequency of the air vibrations.

6. A support structure according to claim 3, wherein

the neck part is freely attachably and removably fixed to the lid part.

7. A support structure according to claim 3, wherein

the neck part is fixed so that an angle of the direction of the narrow path with respect to the lid part freely varies.

8. A support structure according to claim 3, wherein

the neck part is installed so that the narrow path direction faces the amplitude direction of the air vibrations.

9. A support structure according to claim 3, wherein the capacity of the space covered by the lid part is adjustable.

10. A support structure according to claim 9, further comprising:

an adjustment member, which is for adjusting the capacity of the space covered by the lid part,

a part of the space is filled by means of the adjustment member.

11. A support structure according to claim 9, further comprising:

a partition plate that comprises an adjustment member, which is for adjusting the capacity of the space covered by the lid part, and that partitions a part of the space by means of the adjustment member.

12. A support structure according to claim 9, wherein the capacity of the space is adjusted by means of an insertion member that is supported by the lid part and is able to adjust the amount of insertion into the space covered by the lid part.

13. A support structure according to claim 12, wherein the insertion member and the neck part are formed as a unit.

14. A support structure according to claim 3, wherein at least a part of the lid part is formed by a film-shaped member.

15. A support structure according to claim 1, wherein the resonance apparatus is installed at a position corresponding to a thick part of the air vibrations.

16. A support structure according to claim 1, wherein the resonance apparatus is plurally comprised.

17. A support structure according to claim 16, comprising resonance apparatuses of different resonant frequencies.

18. An exposure apparatus that exposes an image of a pattern to a substrate using a support object supported by a support structure;

wherein

a support structure according to claim 1 is used as the support structure.