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MEMS DOSIMETER

  • US 20100171514A1
  • Filed: 11/05/2009
  • Published: 07/08/2010
  • Est. Priority Date: 11/07/2008
  • Status: Active Grant
First Claim
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1. A dosimeter for passively recording a pressure, comprising:

  • a plurality of breakable structures formed on a chip, at least one structure being breakable at a different pressure level than another structure, and wherein breakage of a subset of the structures is indicative of the pressure experienced by the dosimeter.

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