ORGANIC THIN FILM TRANSISTOR SUBSTRATE AND METHOD OF MANUFACTURING THE SAME

• US 20100173451A1
• Filed: 03/15/2010
• Published: 07/08/2010
• Est. Priority Date: 07/28/2006
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Yoon, Min Ho, CHO, Seung Hwan, Song, Keun Kyu
• Granted Patent: US 8,252,625 B2
• Time in Patent Office: Days
• US Class Current: 438/99
• CPC Class Codes: H10K 10/466 Lateral bottom-gate IGFETs comprising only a single gate
• CPC Class Codes: H10K 10/484 characterised by the channel regions
• CPC Class Codes: H10K 19/10 comprising field-effect transistors

Abstract

The present invention provides an organic thin film transistor substrate and a method of manufacturing the same capable of uniformly forming the thickness of a gate insulating layer and a protective layer and preventing overflow of an organic semiconductive layer.

The organic thin film transistor according to the present invention comprises a gate line formed on a substrate; a data line which intersects the gate line with an organic gate insulating layer interposed therebetween to define a pixel area; a thin film transistor connected with the gate line and the data line and which includes an organic semiconductive layer; a pixel electrode connected with the thin film transistor and formed in the pixel area; an organic protective layer formed parallel with the gate line to cover the organic semiconductive layer and its peripheral area; a first border insulating layer stepwise formed so that the organic gate insulating layer and the protective layer are filled, and a second border insulating layer formed on the source electrode and the drain electrode of the thin film transistor so that the organic semiconductive layer is filled.

Claims

1. A method of manufacturing a thin film transistor substrate, the method comprising:

forming a gate line and a gate electrode connected with the gate line on the substrate;

stepwise forming a first border insulating layer having a first containment hole and a second containment hole which expose the gate electrode;

forming a gate insulating layer to be filled within the first containment hole;

forming a data line intersecting the gate line, a source electrode connected with the data line, a drain electrode facing the source electrode, a pixel electrode connected with the drain electrode, and a second border insulating layer formed on the source electrode, the drain electrode, and the data line;

forming a semiconductive layer constituting a channel between the source electrode and the drain electrode within an area provided by the first border insulating layer and the second border insulating layer; and

forming a protective layer within the second containment hole to cover the semiconductive layer and its peripheral area.

2. The method of claim 1, wherein the forming of the first border insulating layer comprises forming a first sub-border insulating layer which provides the first containment hole, and a second sub-border insulating layer which provides the second containment hole connected with the first containment hole to have the width wider than that of the first containment hole.

3. The method of claim 2, wherein the first border insulating layer is formed of a layer containing a fluorine group.

4. A method of claim 2, wherein an area exposed by the first containment hole has a hydrophilic property with the gate insulating layer, and a remaining area has a hydrophobic property with the gate insulating layer.

5. The method of claim 2, wherein an area exposed by the second containment hole has a hydrophilic property with the protective layer, and a remaining area has a hydrophobic property with the protective layer.

6. The method of claim 1, wherein a channel area of the thin film transistor exposed by the second border insulating layer has a hydrophilic property with the semiconductive layer, and a remaining area has a hydrophobic property with the semiconductive layer.

7. The method of claim 1, wherein the forming of the data line, the source electrode, the drain electrode, the pixel electrode, and the second border insulating layer comprises:

sequentially forming a first conductive layer formed of a transparent conductive layer and a second conductive layer formed of at least one opaque metal on a substrate on which the gate insulating layer is formed;

forming a stepped structure of the second border insulating layer on the second conductive layer;

forming the data line and the source/drain metal patterns including the source electrode and the drain electrode and the pixel electrode on the first border insulating layer by patterning the first conductive layer and the second conductive layer using as a mask the second border insulating layer;

exposing the second conductive layer of the pixel electrode and the second conductive layer of the source electrode and the drain electrode of the channel by ashing the second border insulating layer; and

removing the second conductive layer exposed.

8. The method of claim 7, wherein the second border insulating layer is formed on the second conductive layer to have the same width as that of the second conductive layer or to be wider than the width of the second conductive layer.

9. The method of claim 8, wherein the second border insulating layer is formed of a photosensitive layer.

10. The method of claim 1, wherein the second border insulating layer is formed on the second conductive layer to have the same width as that of the second conductive layer or to be wider than the width of the second conductive layer.

11. The method of claim 1, wherein the semiconductive layer is a organic semiconductive layer.

12. The method of claim 11, wherein the forming of the first border insulating layer comprises forming a first sub-border insulating layer which provides the first containment hole, and a second sub-border insulating layer which prepares the second containment hole connected with the first containment hole to have the width wider than that of the first containment hole.

13. The method of claim 12, wherein the forming of the data line, the source electrode, the drain electrode, the pixel electrode, and the second border insulating layer comprises:

sequentially forming a first conductive layer formed of a transparent conductive layer and a second conductive layer formed of at least one opaque metal on a substrate on which the gate insulating layer is formed;

forming a stepped structure of the second border insulating layer on the second conductive layer;

forming the data line and the source/drain metal patterns including the source electrode and the drain electrode and the pixel electrode on the first border insulating layer by patterning the first conductive layer and the second conductive layer using as a mask the second border insulating layer;

exposing the second conductive layer of the pixel electrode and the second conductive layer of the source electrode and the drain electrode of the channel by ashing the second border insulating layer; and

removing the second conductive layer exposed.

14. The method of claim 11, wherein the gate insulating layer is a organic gate insulating layer.

15. The method of claim 14, wherein the forming of the first border insulating layer comprises forming a first sub-border insulating layer which provides the first containment hole, and a second sub-border insulating layer which provides the second containment hole connected with the first containment hole to have the width wider than that of the first containment hole.

16. The method of claim 11, wherein the protective layer is a organic protective layer.

17. The method of claim 16, wherein the forming of the first border insulating layer comprises forming a first sub-border insulating layer which provides the first containment hole, and a second sub-border insulating layer which provides the second containment hole connected with the first containment hole to have the width wider than that of the first containment hole.