Organic light emitting display device and method of manufacturing the same

• US 20100176383A1
• Filed: 01/08/2010
• Published: 07/15/2010
• Est. Priority Date: 01/12/2009
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Mobile Display Co., Ltd.
• Inventors: Jeong, Jae-Kyeong, Chung, Hyun-Joong, Kim, Min-Kyu, Ahn, Tae-Kyung, Park, Jin-Seong, Mo, Yeon-Gon
• Granted Patent: US 8,436,342 B2
• Time in Patent Office: Days
• US Class Current: 257/40
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/1229 with different crystal properties within a device or between different devices
• CPC Class Codes: H10K 2102/101 comprising transparent conductive oxides [TCO]
• CPC Class Codes: H10K 59/1213 the pixel elements being TFTs

Abstract

Disclosed is an organic light emitting display device and a method of manufacturing the same. The organic light emitting display device includes the thin film transistor of the drive unit that has the activation layer formed in a structure where the first oxide semiconductor layer and the second oxide semiconductor layer are stacked, the thin film transistor of the pixel unit that has the activation layer formed of the second oxide semiconductor layer, and the organic light emitting diode coupled to the thin film transistor of the pixel unit. The thin film transistor of the drive unit has channel formed on the first oxide semiconductor layer having a higher carrier concentration than the second oxide semiconductor layer, having a high charge mobility, and the thin film transistor of the pixel unit has a channel formed on the second oxide semiconductor layer, having a stable and uniform functional property.

Claims

1. An organic light emitting display device, comprising:

a substrate that includes a first region and a second region;

a first thin film transistor that comprises a gate electrode formed in the first region disposed on the substrate, an activation layer insulated from the gate electrode by a gate insulating layer and formed in a structure where a first semiconductor layer and a second semiconductor layer are sequentially stacked, and source and drain electrodes electrically and physically coupled to the activation layer, with the first oxide semiconductor layer having a higher carrier concentration compared to that of the second oxide semiconductor layer;

a second thin film transistor that comprises a gate electrode formed in the second region disposed on the substrate, an activation layer insulated from the gate electrode by a gate insulating layer and formed of the second oxide semiconductor layer, and source and drain electrodes electrically and physically coupled to the activation layer;

an insulating layer that is formed on the second thin film transistor and has a via hole in order that one of the source and drain electrodes of the second thin film transistor is exposed; and

an organic light emitting diode that comprises a first electrode formed on the insulating layer disposed in the second region and the first electrode electrically coupled to one of the source and drain electrodes of the second thin film transistor through the via hole, an organic light emitting layer formed on the first electrode, and a second electrode formed on the organic light emitting layer.

2. The organic light emitting display device as claimed in claim 1, wherein the first region is a drive unit.

3. The organic light emitting display device as claimed in claim 1, wherein the first oxide semiconductor layer is formed between the second oxide semiconductor layer and the gate insulating layer.

4. The organic light emitting display device as claimed in claim 1, wherein the first oxide semiconductor layer is selected from a group consisting of ITO, InZnO, InSnO, AlZnO, AlGaO and InGaO.

5. The organic light emitting display device as claimed in claim 1, wherein the first oxide semiconductor layer is formed to be thinner than the second oxide semiconductor layer.

6. The organic light emitting display device as claimed in claim 5, wherein the first oxide semiconductor layer is formed with a thickness of 1 to 5 nm.

7. The organic light emitting display device as claimed in claim 1, wherein the second oxide semiconductor layer comprises zinc oxide (ZnO).

8. The organic light emitting display device as claimed in claim 7, wherein the second oxide semiconductor layer is doped with at least one ion selected from gallium (Ga), indium (In), stannum (Sn), zirconium (Zr), hafnium (Hf), cadmium (Cd), silver (Ag), copper (Cu), germanium (Ge), gadolinium (Gd), and vanadium (V).

9. The organic light emitting display device as claimed in claim 1, wherein the first oxide semiconductor layer has a carrier concentration of 1e+19#/cm³ to 1e+21#/cm³, and the second oxide semiconductor layer has a carrier concentration of 1e+13#/cm³ to 1e+18#/cm³.

10. A method of manufacturing an organic light emitting display device, comprising:

preparing a substrate that includes a first region and a second region;

forming gate electrodes of first and second thin film transistors respectively in the first and second regions on the substrate;

forming a gate insulating layer on the gate electrodes formed in the first and second regions;

forming a first activation layer formed in a structure where a first semiconductor layer and a second semiconductor layer are stacked on the gate insulating layer in the first region, the first oxide semiconductor layer having a higher carrier concentration compared to that of the second oxide semiconductor layer, and forming a second activation layer formed of the second oxide semiconductor layer on the gate insulating layer in the second region;

forming source and drain electrodes to be electrically and physically coupled to the first and second activation layers respectively disposed in the first and second regions;

forming an insulating layer on the second thin film transistor and then forming a via hole in order that one of the source and drain electrodes of the second thin film transistor is exposed; and

forming an organic light emitting diode that comprises a first electrode formed on the insulating layer in the second region and the first electrode electrically coupled to one of the source and drain electrodes of the second thin film transistor through the via hole, an organic light emitting layer formed on the first electrode, and a second electrode formed on the organic light emitting layer.

11. The method of manufacturing the organic light emitting display device as claimed in claim 10, wherein the first region is a drive unit.

12. The method of manufacturing the organic light emitting display device as claimed in claim 10, wherein the first oxide semiconductor layer made of at least one material selected from a group consisting of ITO, InZnO, InSnO, AlZnO, AlGaO and InGaO.

13. The method of manufacturing the organic light emitting display device as claimed in claim 10, wherein the first oxide semiconductor layer is formed to be thinner than the second oxide semiconductor layer.

14. The method of manufacturing the organic light emitting display device as claimed in claim 13, wherein the first oxide semiconductor layer is formed with a thickness of 1 to 5 nm.

15. The method of manufacturing the organic light emitting display device as claimed in claim 10, wherein the second oxide semiconductor layer comprises zinc oxide (ZnO).

16. The method of manufacturing the organic light emitting display device as claimed in claim 15, wherein the second oxide semiconductor layer is doped with at least one ion selected from gallium (Ga), indium (In), stannum (Sn), zirconium (Zr), hafnium (Hf), cadmium (Cd), silver (Ag), copper (Cu), germanium (Ge), gadolinium (Gd), and vanadium (V).

17. The method of manufacturing the organic light emitting display device as claimed in claim 10, wherein the forming the activation layer comprises:

forming the first oxide semiconductor layer on the gate insulating layer in the first and second regions;

patterning the first oxide semiconductor layer;

forming the second oxide semiconductor layer in the first and second regions in which the first oxide semiconductor layer is included; and

patterning the second semiconductor layer in the first and second regions.

18. An organic light emitting display device, comprising:

a first thin film transistor disposed on a non-pixel region of a substrate, the first thin film transistor comprising a first activation layer formed by a first semiconductor layer and a second semiconductor layer which are disposed in immediate physical contact with each other, with the first oxide semiconductor layer having a different value of carrier concentration compared to that of the second oxide semiconductor layer;

a second thin film transistor disposed on a pixel region of the substrate, the second thin film transistor having a second activation layer formed of one of the first and second oxide semiconductor layers.

19. The organic light emitting display device of claim 18, with the first oxide semiconductor layer having a higher value of the carrier concentration compared to that of the second oxide semiconductor layer.

20. The organic light emitting display device of claim 19, with the second activation layer being formed of the second oxide semiconductor layer.