SYSTEMS, APPARATUS AND METHODS FOR MAKING AN ELECTRICAL CONNECTION

• US 20100178135A1
• Filed: 01/08/2010
• Published: 07/15/2010
• Est. Priority Date: 01/11/2009
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Laceky, William P., Kremerman, Izya
• Granted Patent: US 8,264,187 B2
• Time in Patent Office: Days
• US Class Current: 414/217
• CPC Class Codes: B25J 19/0029 arranged within the different robot elements
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance
• CPC Class Codes: Y10T 74/20311 including power cable or connector

Abstract

Systems, apparatus and methods are disclosed for allowing electrical connection to an electrical end effector in a robot apparatus. In one aspect, an electrical coupling is adapted to provide electrical power to the electrical end effector in the vacuum chamber. The electrical coupling may include engaging electrical contacts. In some embodiments, at least one of the contacts may be suspended relative to a spring such that the engaging contacts do not rotate relative to each other during arm rotation of the robot. In other embodiments, inductively coupled coils are included. Numerous other aspects are provided.

Claims

1. A robotic system, comprising:

a vacuum chamber;

a robot apparatus adapted to transport substrates within the vacuum chamber, the robot apparatus including;

a plurality of arms adapted to be rotated within the vacuum chamber,

an electrical end effector attached to at least one of the plurality of arms, and

an electrical coupling adapted to provide electrical energy to the electrical end effector in the vacuum chamber.

2. The system of claim 1 wherein the electrical coupling comprises selectively engaging contacts.

3. The system of claim 1 wherein the electrical coupling comprises an electromagnet operative to move a first set of contacts into contact with a second set of contacts.

4. The system of claim 1 wherein the electrical coupling comprises inductively coupleable coils.

5. The system of claim 1 wherein an electrical circuit connected to the electrical end effector passes through rotation joints of the plurality of arms.

6. The system of claim 1 wherein the electrical coupling comprises a moveable member suspended by a spring member.

7. The system of claim 6 wherein the moveable member includes electrical contacts.

8. The system of claim 7 wherein the electrical coupling includes an electromagnet adapted to cause movement of the moveable member and an engagement of the electrical contacts with electrical contacts coupled to a shaft of the robot apparatus.

9. The system of claim 1 wherein the electrical coupling comprises an engaging recess and pilot adapted to align engaging electrical contacts.

10. The system of claim 1 wherein the electrical coupling is electrically coupled to a capacitor member adapted to provide energy to the electrical end effector.

11. A substrate transporting robot apparatus adapted to move substrates within an electronic device processing system, comprising:

a robot including at least one moveable arm and an electrical end effector attached to the at least one moveable arm; and

an electrical coupling adapted to provide electrical energy from a power source to the electrical end effector.

12. The apparatus of claim 11 wherein the electrical coupling comprises selectively engaging electrical contacts.

13. The apparatus of claim 12 wherein the selectively engaging electrical contacts comprise opposing pairs of annular rings.

14. The apparatus of claim 11 wherein the electrical coupling comprises inductively coupleable coils.

15. The apparatus of claim 11 wherein the electrical coupling comprises a moveable member suspended by a spring member.

16. The apparatus of claim 11 wherein the spring member is adapted to allow rotation of the moveable member in torsion such that the moveable member rotates with a shaft coupled to the robot apparatus when the electrical coupling is in an engaged condition.

17. The apparatus of claim 11 wherein the electrical coupling comprises an electromagnet adapted to move a first set of electrical contacts into contact with a second set of electrical contacts.

18. A method of moving a substrate within an electronic device processing tool, comprising the steps of:

providing a robot within a vacuum chamber, the robot including an electrical end effector; and

supplying electrical energy to electrical leads coupled to the electrical end effector by passing the electrical current through selectively engageable contacts or inductively coupleable coils.

19. A substrate transporting robot apparatus adapted to move substrates within an electronic device processing system, comprising:

a robot including moveable arms and an electrical end effector attached to one of the arms; and

electrical leads coupled to the electrical end effector which pass through rotational joints of the moveable arms.

20. The substrate transporting robot apparatus of claim 19 wherein the electrical leads are clamped at locations proximate the rotational joints.

21. The substrate transporting robot apparatus of claim 20 wherein the electrical leads are clamped in channels by a clamping member.

22. The substrate transporting robot apparatus of claim 19 further comprising a positioning member adapted to approximately align the electrical leads with a center of the rotational joints.

23. The substrate transporting robot apparatus of claim 19 wherein the electrical leads connect between the electrical end effector and an electrical coupling including selectively engageable contacts or inductively coupleable coils.