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METHOD FOR CONTROLLING FLOW AND CONCENTRATION OF LIQUID PRECURSOR

  • US 20100178423A1
  • Filed: 01/13/2009
  • Published: 07/15/2010
  • Est. Priority Date: 01/13/2009
  • Status: Active Grant
First Claim
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1. A method for controlling flow and concentration of a liquid precursor, comprising:

  • supplying a carrier gas to a first auto-pressure regulator and outputting therefrom the carrier gas at a first pressure to an inlet of a precursor reservoir that stores a vaporized precursor, thereby outputting a mixture of the vaporized precursor and the carrier gas from the precursor reservoir through an outlet of the precursor reservoir, said first auto-pressure regulator being provided upstream of the precursor reservoir; and

    supplying the mixture of the vaporized precursor and the carrier gas to a second auto-pressure regulator and outputting therefrom the mixture at a second pressure to a reactor via an orifice, said second auto-pressure regulator being provided downstream of the precursor reservoir and said orifice being provided downstream of said second auto-pressure regulator.

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