SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND METHOD FOR MANUFACTURING THE SAME
First Claim
1. A shower plate disposed in a plasma processing apparatus and releasing plasma excitation gas into the plasma processing apparatus so as to generate plasma,wherein a ceramic member and/or a porous gas-communicating body are formed in the inside of each of a plurality of vertical holes as release paths for plasma excitation gas,the ceramic member has a plurality of gas release holes having a diameter of 20 μ
- m to 70 μ
m,the porous gas-communicating body has pores having a maximum diameter of not more than 75 μ
m, the pores communicating in a gas-communicating direction, andthe ceramic member and/or the porous gas-communicating body are sintered and bonded integrally with the shower plate.
1 Assignment
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Accused Products
Abstract
A shower plate is disposed in a processing chamber in a plasma processing apparatus, and plasma excitation gas is released into the processing chamber so as to generate plasma. A ceramic member having a plurality of gas release holes having a diameter of 20 μm to 70 μm, and/or a porous gas-communicating body having pores having a maximum diameter of not more than 75 μm communicating in the gas-communicating direction are sintered and bonded integrally with the inside of each of a plurality of vertical holes which act as release paths for the plasma excitation gas.
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Citations
10 Claims
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1. A shower plate disposed in a plasma processing apparatus and releasing plasma excitation gas into the plasma processing apparatus so as to generate plasma,
wherein a ceramic member and/or a porous gas-communicating body are formed in the inside of each of a plurality of vertical holes as release paths for plasma excitation gas, the ceramic member has a plurality of gas release holes having a diameter of 20 μ - m to 70 μ
m,the porous gas-communicating body has pores having a maximum diameter of not more than 75 μ
m, the pores communicating in a gas-communicating direction, andthe ceramic member and/or the porous gas-communicating body are sintered and bonded integrally with the shower plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
- m to 70 μ
Specification