METHODS AND APPARATUS FOR FLUID DELIVERY AND REMOVAL OF MICRON SCALE STRUCTURES
First Claim
1. A method for fluid delivery of a micron scale structure comprising:
- providing a silicon device that comprises a plurality of wells, wherein each of the wells includes a bottom wall, a side wall, a top opening and a plurality of protrusions that extend into the interior of the well;
delivering a plurality of micron scale structures into the wells using a fluid;
removing the fluid from the wells, whereby spaces between the protrusions facilitate flow and removal of the fluid; and
allowing the protrusions to retain the plurality of micron scale structures in the wells.
1 Assignment
0 Petitions
Accused Products
Abstract
Methods and apparatus for the fluid delivery and removal of micron scale structures that increase the efficiency of such fluid delivery and removal. An exemplary method for fluid delivery of a micron scale structure includes providing a silicon device that comprises a plurality of wells. Each of the wells includes a bottom wall, a side wall, a top opening and a plurality of protrusions that extend into the interior of the well. A plurality of micron scale structures are delivered into the wells using a fluid. The fluid is then removed from the wells, whereby spaces between the protrusions facilitate flow and removal of the fluid. The protrusions then retain the plurality of micron scale structures in the wells.
4 Citations
19 Claims
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1. A method for fluid delivery of a micron scale structure comprising:
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providing a silicon device that comprises a plurality of wells, wherein each of the wells includes a bottom wall, a side wall, a top opening and a plurality of protrusions that extend into the interior of the well; delivering a plurality of micron scale structures into the wells using a fluid; removing the fluid from the wells, whereby spaces between the protrusions facilitate flow and removal of the fluid; and allowing the protrusions to retain the plurality of micron scale structures in the wells. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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- 8. An apparatus for fluid delivery of a micron scale structure comprising a silicon device that comprises a plurality of wells, wherein each of the wells includes a bottom wall, a side wall, a top opening and a plurality of protrusions that extend into the interior of the well.
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10. A method for fluid removal of a micron scale structure comprising:
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providing a silicon device that has been etched to produce the micron scale structure, wherein the micron scale structure includes a plurality of protrusions extending from the surface thereof, removing the micron scale structure from the silicon device using a fluid, whereby spaces between the protrusions decrease the surface contact area between the micron scale structure and the silicon device and facilitate flow of the fluid and removal of the micron scale structure. - View Dependent Claims (11, 12, 13, 14, 15)
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- 16. An apparatus for fluid removal of a micron scale structure comprising a silicon device that has been etched to produce the micron scale structure, wherein the micron scale structure includes a plurality of protrusions extending from the surface thereof and whereby spaces between the protrusions decrease the surface contact area between the micron scale structure and the silicon device and facilitate flow of a fluid and removal of the micron scale structure using the fluid.
Specification