ELECTROSTATICALLY ACTUATED NON-LATCHING AND LATCHING RF-MEMS SWITCH

• US 20100181173A1
• Filed: 01/15/2010
• Published: 07/22/2010
• Est. Priority Date: 01/19/2009
• Status: Active Grant

• Current Assignee: Team Technologies Incorporated (Team Technologies Holding Co.)
• Original Assignee: Team Technologies Incorporated (Team Technologies Holding Co.)
• Inventors: Mireles, Jose G., Campbell, James Henry, Rodriguez, Lorenzo G.
• Granted Patent: US 8,207,460 B2
• Time in Patent Office: Days
• US Class Current: 200/181
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: H01H 9/38 Auxiliary contacts on to which the arc is transferred from the main contacts using arcing-horns H01H9/46

Abstract

An RF MEMS switch apparatus includes a planar substrate and an electrostatic actuator formed thereon. The electrostatic actuator includes two sets of interdigitated comb which is capable of moving an armature and a shunt contact head. The armature can be connected to the substrate through a main return spring and one or more contact head support springs. The shunt contact head includes a primary shunt contact and one or more spring-loaded sacrificial contacts. The shunt contact head can serve as a primary contact to bridge a stationary input electrode and an output electrode. The switch is off in a relaxed position and when actuated the primary shunt contact comes into direct mechanical contact with the stationary input electrode and the stationary output electrode. The switch remains closed as long as the actuator is powered and the springs return the armature to the relaxed position when the power is removed.

Claims

1. A radio-frequency MEMS switch, comprising:

an armature connected to a planar substrate via a main return spring and a plurality of contact head support springs;

a shunt contact head that includes a primary shunt contact and a plurality of spring-loaded sacrificial contacts, wherein said shunt contact head serves as a primary contact to bridge a stationary input electrode and a stationary output electrode; and

an actuator formed on said planar substrate capable of moving said armature and said shunt contact head, wherein said actuator is actuated so that said primary shunt contact comes into direct mechanical contact with said stationary input electrode and said stationary output electrode to close circuit as long as said actuator is powered.

2. The MEMS switch of claim 1 wherein said return spring and said plurality of contact head support springs maintain said armature in a normally OFF switch open position.

3. The MEMS switch of claim 1 wherein said return spring return said armature to a relaxed position if power is removed from said actuator.

4. The MEMS switch of claim 1 further comprising:

a moving comb associated with said actuator and mechanically connected to said armature; and

a stationary comb associated with said actuator and connected to said substrate.

5. The MEMS switch of claim 4 wherein said moving comb and said stationary comb comprises an interdigitated electrode face topography.

6. The MEMS switch of claim 4 further comprising:

an electrically conductive film deposited on adjacent faces associated with said moving comb and said stationary comb in such a manner as to create an actuation force in a direction of closure when said faces of said actuator is electrically biased.

7. The MEMS switch of claim 1 wherein said actuator is actuated based on an electrostatically actuated latching mechanism in a normally open position.

8. The MEMS switch of claim 1 wherein said actuator comprises at least one electrostatic actuation mechanism.

9. The MEMS switch of claim 1 wherein said return spring and said plurality of contact head support springs comprises a dual-slope spring constant operative in different regions of spring travel.

10. The MEMS switch of claim 1 wherein said return spring and said plurality of contact head support springs is configured to comprise at least one of the following types of spring members:

a rectangular spring member;

a serpentine spring member;

or

a sagittal spring member.

11. A radio-frequency MEMS switch, comprising:

an armature connected to a substrate via a main return spring and a plurality of contact head support spring, wherein said substrate comprises a silicon-on-insulator wafer;

a shunt contact head that includes a primary shunt contact and a plurality of spring-loaded sacrificial contacts, wherein said shunt contact head serves as a primary contact to bridge a stationary input electrode and a stationary output electrode; and

an actuator formed on said substrate capable of moving said armature and said shunt contact head, wherein said actuator is actuated so that said primary shunt contact comes into direct mechanical contact with said stationary input electrode and said stationary output electrode to close circuit as long as said actuator is powered.

12. A radio-frequency MEMS switch, comprising:

an armature connected to a planar substrate via a main return spring and a plurality of contact head support springs;

a shunt contact head that includes a primary shunt contact and a plurality of spring-loaded sacrificial contacts, wherein said shunt contact head serves as a primary contact to bridge a stationary input electrode and a stationary output electrode;

an actuator formed on said planar substrate capable of moving said armature and said shunt contact head, wherein said actuator comprises at least one electrostatic actuation mechanism;

a moving comb associated with said actuator and mechanically connected to said armature; and

a stationary comb associated with said actuator and connected to said substrate, wherein said actuator is actuated so that said primary shunt contact comes into direct mechanical contact with said stationary input electrode and said stationary output electrode to close circuit as long as said actuator is powered.

13. The MEMS switch of claim 12 wherein:

said return spring and said plurality of contact head support springs maintain said armature in a normally OFF switch open position; and

said return spring return said armature to a relaxed position if power is removed from said actuator.

14. The MEMS switch of claim 12 wherein said moving comb and said stationary comb comprises an interdigitated electrode face topography.

15. The MEMS switch of claim 12 further comprising:

an electrically conductive film deposited on adjacent faces associated with said moving comb and said stationary comb in such a manner as to create an actuation force in a direction of closure when said faces of said actuator is electrically biased.

16. A method, comprising:

patterning a plurality of trenches on a substrate to hold vertical metallization with respect to a plurality of contacts and electrode plates associated with a MEMS switch;

filling said plurality of trenches with a conductive metal and exposing said plurality of contacts and electrode plates by an etching process; and

patterning and etching said substrate to fabricate an actuator, a return spring, a plurality of support springs, and a contact head.

17. The method of claim 16 further comprising configuring said substrate comprises a silicon-on-insulator wafer.

18. The method of claim 16 further comprising implementing said etching process as a deep reactive ion etching process.

19. The method of claim 16 further comprising depositing an insulating layer with respect to said substrate.

20. The method of claim 16 further comprising configuring said to comprises at least one electrostatic actuation mechanism.