MECHANICAL RESONATING STRUCTURES INCLUDING A TEMPERATURE COMPENSATION STRUCTURE
First Claim
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1. A device comprising:
- a mechanical resonating structure including;
an active layer; and
a compensating structure coupled to the active layer, the compensating structure comprisinga first layer having a stiffness that increases with increasing temperature over at least a first temperature range,a third layer having a stiffness that increases with increasing temperature over at least the first temperature range, anda second layer between the first layer and the third layer.
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Abstract
Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations.
90 Citations
33 Claims
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1. A device comprising:
a mechanical resonating structure including; an active layer; and a compensating structure coupled to the active layer, the compensating structure comprising a first layer having a stiffness that increases with increasing temperature over at least a first temperature range, a third layer having a stiffness that increases with increasing temperature over at least the first temperature range, and a second layer between the first layer and the third layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A device comprising:
a mechanical resonating structure comprising an active layer and a compensation structure coupled to the active layer and configured to compensate temperature-induced variations in stiffness of at least the active layer, the compensation structure comprising a first layer, a second layer, and a third layer, wherein the first and third layers are formed of a first material and wherein the second layer is formed of a second material different than the first material, and wherein the second layer is disposed between the first layer and the second layer. - View Dependent Claims (30, 31, 32, 33)
Specification