IRREGULARLY SHAPED ACTUATOR FINGERS FOR A MICRO-ELECTROMECHANICAL SYSTEM FABRY-PEROT FILTER
First Claim
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1. A micro-electrical mechanical system apparatus, comprising:
- a comb drive actuator having a first finger, a surface of said first finger is non-planar; and
at least one movable Fabry-Perot filter cavity mirror coupled to said comb drive actuator.
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Abstract
According to one embodiment, a micro-electrical mechanical system apparatus includes (i) a comb drive actuator having at least one irregularly shaped finger and (ii) a movable Fabry-Perot filter cavity mirror coupled to the comb drive actuator. According to some embodiments, a relationship between a voltage applied to the comb drive actuator and an amount of displacement associated with the movable mirror is substantially linear.
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Citations
23 Claims
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1. A micro-electrical mechanical system apparatus, comprising:
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a comb drive actuator having a first finger, a surface of said first finger is non-planar; and at least one movable Fabry-Perot filter cavity mirror coupled to said comb drive actuator. - View Dependent Claims (2, 3, 4, 5, 7, 8, 9, 10, 11, 12, 13, 14)
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6. (canceled)
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15. A method, comprising:
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routing light from a sample of molecules into a tunable Fabry-Perot cavity; actuating a movable Fabry-Perot filter cavity mirror using a comb drive actuator having a first finger, the first finger having a surface that is non-planar, wherein actuation distances are associated with a spectral range of light wavelengths; and detecting interference patterns across the spectral range. - View Dependent Claims (16, 17)
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18. A spectrometer, comprising:
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a laser source; an analyte sample to reflect light from the laser source; a Fabry-Perot filter cavity to receive the reflected light; at least one movable Fabry-Perot filter cavity mirror associated with said Fabry-Perot filter cavity; a comb drive actuator coupled to said at least one movable mirror, said comb drive actuator having a first finger, a surface of said first finger is non-planar; a detector to detect photons exiting said Fabry-Perot filter cavity over time as said at least one movable mirror is moved by said comb drive actuator; and a decision unit to determine if the analyte sample is associated with at least one type of molecule based on the sensed photons. - View Dependent Claims (19, 20, 21)
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22. A micro-electrical mechanical system apparatus, comprising:
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a comb drive actuator driven by a voltage, said comb drive actuator having a first finger, a first surface of said first finger is non-planar; and at least one movable Fabry-Perot filter cavity mirror coupled to said comb drive actuator, wherein a relationship between the voltage and an amount of displacement associated with said at least one movable mirror is substantially linear. - View Dependent Claims (23)
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Specification