METHODS OF FABRICATING MEMS WITH SPACERS BETWEEN PLATES AND DEVICES FORMED BY SAME
First Claim
1. A microelectromechanical system (MEMS) device, comprising:
- a front substrate comprising a first support extending from the front substrate;
a backplate having a surface substantially opposing the front substrate such that the first support is interposed between the front substrate and the surface of the backplate;
a moving electrode interposed between the front substrate and backplate, the moving electrode comprising a portion supported on the first support; and
a second support extending from one of the first support of the front substrate and the surface of the backplate, wherein the second support is positioned between the first support of the front substrate and the surface of the backplate.
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Accused Products
Abstract
Methods of fabricating a microelectromechanical systems (MEMS) device with spacers between plates and MEMS devices formed by the same are disclosed. In one embodiment, a MEMS device is fabricated by laminating a front substrate and a carrier, each of which has components preformed thereon. The front substrate is provided with stationary electrodes formed thereover. A carrier including movable electrodes formed thereover is attached to the front substrate. The carrier of some embodiments is released after transferring the movable electrodes to the front substrate. In other embodiments, the carrier stays over the front substrate, and serves as a backplate for the MEMS device. Features are formed by deposition and patterning, by embossing, or by patterning and etching. Spacers are provided between the front substrate and the backplate to maintain a gap therebetween. The methods not only reduce the manufacturing costs, but also provide a higher yield. The resulting MEMS devices can trap smaller volumes between laminated substrates and are less susceptible to pressure variations and moisture leakage.
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Citations
25 Claims
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1. A microelectromechanical system (MEMS) device, comprising:
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a front substrate comprising a first support extending from the front substrate; a backplate having a surface substantially opposing the front substrate such that the first support is interposed between the front substrate and the surface of the backplate; a moving electrode interposed between the front substrate and backplate, the moving electrode comprising a portion supported on the first support; and a second support extending from one of the first support of the front substrate and the surface of the backplate, wherein the second support is positioned between the first support of the front substrate and the surface of the backplate. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A microelectromechanical system (MEMS) device, comprising:
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a front substrate having a first surface, the front substrate comprising an optical stack formed over the first surface; a backplate opposing the front substrate, the backplate having a second surface facing the first surface, the backplate comprising posts extending from the second surface toward the first surface such that the height of the posts defines a distance between the first surface and the second surface; and a plurality of movable electrode strips extending substantially parallel to one another, the strips being interposed between the first surface and the second surface. - View Dependent Claims (9)
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10. A microelectromechanical system (MEMS) device, comprising:
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a front substrate; a backplate opposing the front substrate, the backplate having a surface facing the front substrate; a plurality of movable electrode strips extending substantially parallel to one another, the strips being interposed between the front substrate and the backplate, portions of the strips being movable toward the front substrate; and a plurality of posts extending from the surface of the backplate such that the posts are arranged to limit movement of the portions of the strips toward the surface. - View Dependent Claims (11)
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12. A method of making microelectromechanical system (MEMS) device, the method comprising:
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providing a front substrate comprising a first support extending from the front substrate; providing a backplate having a surface; attaching the front substrate to the backplate such that the first support is interposed between the front substrate and the surface of the backplate; and forming a second support between the first support of the front substrate and the surface of the backplate such that the second support extends from one of the first support of the front substrate and the surface of the backplate. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A microelectromechanical system (MEMS) device comprising:
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a front substrate having a first surface, the front substrate including an array region and a peripheral region on the first surface; a backplate having a second surface facing the first surface, the first and second surfaces having a gap therebetween, the backplate including an array region and a peripheral region on the second surface; a conductive line extending on the peripheral region of the front substrate; and a conductive structure extending between the peripheral regions of the front substrate and the backplate, the conductive structure contacting the conductive line. - View Dependent Claims (24, 25)
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Specification