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PLASMA ATOMIC LAYER DEPOSITION SYSTEM AND METHOD

  • US 20100183825A1
  • Filed: 12/28/2009
  • Published: 07/22/2010
  • Est. Priority Date: 12/31/2008
  • Status: Abandoned Application
First Claim
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1. A gas deposition chamber for depositing solid material layers onto substrates supported therein comprising:

  • an external chamber wall disposed along a longitudinal axis and formed to surround a hollow gas deposition volume comprising a volume expanding top portion and a substantially constant volume cylindrical middle portion;

    a top circular aperture axially centered by the longitudinal axis for providing access to the volume expanding top portion and a plasma source flange surrounding the top circular aperture;

    a substrate support chuck comprising a circular substrate support surface supported inside the cylindrical middle portion of the hollow gas deposition volume with the circular substrate support surface axially centered by and substantially orthogonal to the longitudinal axis;

    a bottom circular aperture axially centered by the longitudinal axis for providing access to the cylindrical middle portion of the hollow gas deposition volume wherein the external chamber wall includes a trap flange surrounding the bottom circular aperture and further wherein a diameter of the bottom circular aperture is larger than a diameter of the circular substrate support surface;

    a load port aperture passing through the external chamber wall to the cylindrical middle portion; and

    ,a precursor input port passing through the external chamber wall proximate to the top circular aperture for delivering a gas flow into the volume expanding top portion of the hollow gas deposition volume.

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