PROCESS FOR MANUFACTURING THIN FILM TRANSISTOR
First Claim
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1. A process for manufacturing a thin film transistor, the process comprising the steps of:
- providing an oxide semiconductor precursor solution for an oxide semiconductor layer in which the oxide semiconductor precursor is dissolved in a solvent;
coating the oxide semiconductor precursor solution on a substrate to form an oxide semiconductor precursor layer;
patterning the oxide semiconductor precursor layer so that the oxide semiconductor precursor layer remains at portions where the oxide semiconductor layer is to be formed; and
heating the remaining oxide semiconductor precursor layer to form the oxide semiconductor layer.
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Abstract
Disclosed is a process for manufacturing a thin film transistor, the process comprising the steps of providing an oxide semiconductor precursor solution for an oxide semiconductor layer in which an oxide semiconductor precursor is dissolved in a solvent, coating the oxide semiconductor precursor solution on a substrate to form an oxide semiconductor precursor layer, patterning the oxide semiconductor precursor layer so that the oxide semiconductor precursor layer remains at portions where the oxide semiconductor layer is to be formed, and heating the remaining oxide semiconductor precursor layer to form the oxide semiconductor layer.
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Citations
20 Claims
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1. A process for manufacturing a thin film transistor, the process comprising the steps of:
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providing an oxide semiconductor precursor solution for an oxide semiconductor layer in which the oxide semiconductor precursor is dissolved in a solvent; coating the oxide semiconductor precursor solution on a substrate to form an oxide semiconductor precursor layer; patterning the oxide semiconductor precursor layer so that the oxide semiconductor precursor layer remains at portions where the oxide semiconductor layer is to be formed; and heating the remaining oxide semiconductor precursor layer to form the oxide semiconductor layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification