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PROCESS FOR MANUFACTURING THIN FILM TRANSISTOR

  • US 20100184253A1
  • Filed: 06/19/2009
  • Published: 07/22/2010
  • Est. Priority Date: 06/24/2008
  • Status: Abandoned Application
First Claim
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1. A process for manufacturing a thin film transistor, the process comprising the steps of:

  • providing an oxide semiconductor precursor solution for an oxide semiconductor layer in which the oxide semiconductor precursor is dissolved in a solvent;

    coating the oxide semiconductor precursor solution on a substrate to form an oxide semiconductor precursor layer;

    patterning the oxide semiconductor precursor layer so that the oxide semiconductor precursor layer remains at portions where the oxide semiconductor layer is to be formed; and

    heating the remaining oxide semiconductor precursor layer to form the oxide semiconductor layer.

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