Polishing Pad and System with Window Support

• US 20100184357A1
• Filed: 12/22/2009
• Published: 07/22/2010
• Est. Priority Date: 01/16/2009
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Cui, Ningzhuo, Benvegnu, Dominic J., Swedek, Boguslaw A., Qian, Jun, Osterheld, Thomas H.
• Granted Patent: US 8,393,933 B2
• Time in Patent Office: Days
• US Class Current: 451/6
• CPC Class Codes: B24B 37/013 Devices or means for detecting lapping completion
• CPC Class Codes: B24B 37/205 provided with a window for inspecting the surface of the work being lapped
• CPC Class Codes: B24B 49/12 involving optical means

Abstract

A polishing system includes a polishing pad having a solid light-transmissive window, an optical fiber having an end, and a spacer having a vertical aperture therethrough. A bottom surface of the spacer contacts the end of the optical fiber, a top surface of the spacer contacts the underside of the window, and the vertical aperture is aligned with the optical fiber.

Claims

1. A polishing system, comprising:

a polishing pad having a solid light-transmissive window;

an optical fiber having an end; and

a spacer having a vertical aperture therethrough, a bottom surface of the spacer contacting the end of the optical fiber, a top surface of the spacer contacting the underside of the window, the vertical aperture aligned with the optical fiber.

2. The polishing system of claim 1, wherein the aperture is aligned with a central axis of the optical fiber.

3. The polishing system of claim 1, further comprising a platen supporting the polishing pad.

4. The polishing system of claim 3, wherein the end of the optical fiber is coplanar with a top surface of the platen.

5. The polishing system of claim 3, wherein the spacer is not supported by the platen.

6. The polishing system of claim 3, wherein an outer perimeter of the spacer is supported by the platen.

7. The polishing system of claim 3, wherein the spacer is secured to the optical fiber.

8. The polishing system of claim 7, wherein the spacer is adhesively secured to the optical fiber.

9. The polishing system of claim 3, wherein the spacer is secured to the window.

10. The polishing system of claim 7, wherein the spacer is adhesively secured to the window.

11. The polishing system of claim 3, wherein the end of the optical fiber projects above a top surface of the platen.

12. The polishing system of claim 11, wherein the spacer comprises an O-ring.

13. The polishing system of claim 1, wherein an outer diameter of the spacer is smaller than an outer diameter of the optical fiber.

14. The polishing system of claim 13, wherein the spacer comprises an O-ring.

15. The polishing system of claim 1, wherein the polishing pad includes a polishing layer and a backing layer.

16. The polishing system of claim 15, wherein the spacer is spaced apart from and does not contact the backing layer.

17. The polishing system of claim 15, wherein the spacer and backing layer are formed of the same material.

18. The polishing system of claim 15, wherein the spacer and the backing layer have the same thickness.

19. The polishing system of claim 15, wherein the underside of the window is coplanar with a bottom surface of the polishing layer.

20. The polishing system of claim 1, further comprising an optical monitoring system including a light source and a detector, and wherein the optical fiber includes a first branch connecting the end to the light source and a second branch connecting the end to the detector.

21. A polishing system, comprising:

a polishing pad having a polishing layer, a backing layer, a solid light-transmissive window in the polishing layer, and an aperture in the backing layer aligned with the window; and

an optical fiber having an end, the width of the aperture in the backing layer smaller than the diameter of the optical fiber, the vertical aperture aligned with the optical fiber and a bottom surface of the backing layer contacting the end of the optical fiber.